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1. (WO2013146318) MOLD MANUFACTURING METHOD AND MANUFACTURING DEVICE

Pub. No.:    WO/2013/146318    International Application No.:    PCT/JP2013/057272
Publication Date: Fri Oct 04 01:59:59 CEST 2013 International Filing Date: Fri Mar 15 00:59:59 CET 2013
IPC: B29C 33/38
G03F 7/20
H01L 21/027
Applicants: SUMITOMO CHEMICAL COMPANY, LIMITED
住友化学株式会社
Inventors: FUJII, Takashi
藤井 貴志
Title: MOLD MANUFACTURING METHOD AND MANUFACTURING DEVICE
Abstract:
Provided are a mold manufacturing method and a developing device optimal for implementing said method. This manufacturing method of a mold used in manufacture of display device members involves: a photosensitive resin film forming step for forming a photosensitive resin film by coating the metal surface of a mold substrate with a coating liquid containing a photosensitive resin and a light absorbing agent having an absorption maximum wavelength different from the exposure wavelength of the photosensitive resin; an exposure step for exposing a pattern on a photosensitive resin film; a developing step for using a developing solution to develop the photosensitive resin film where the pattern is exposed; and a development stopping step for stopping development of the photosensitive resin film. In the developing step, the exposure wavelength surface is irradiated with irradiation of a wavelength in the absorption wavelength range of the light absorbing agent such that the amount of light absorbed by the metal surface is less than the amount of light absorbed by the photosensitive resin film, and the timing of transition to the development stopping step is determined on the basis of the amount of reflected light.