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Machine translation
1. (WO2013146185) ANNULAR MEMBER AND FILM-FORMING DEVICE IN WHICH SAME IS USED
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2013/146185    International Application No.:    PCT/JP2013/056448
Publication Date: 03.10.2013 International Filing Date: 08.03.2013
IPC:
C23C 14/00 (2006.01)
Applicants: KYOCERA CORPORATION [JP/JP]; 6, Takeda Tobadono-cho, Fushimi-ku, Kyoto-shi, Kyoto 6128501 (JP)
Inventors: INOUE, Tomoyuki; (JP)
Priority Data:
2012-077970 29.03.2012 JP
2012-168046 30.07.2012 JP
Title (EN) ANNULAR MEMBER AND FILM-FORMING DEVICE IN WHICH SAME IS USED
(FR) ÉLÉMENT ANNULAIRE ET DISPOSITIF DE FORMATION DE FILM L'UTILISANT
(JA) 環状部材およびそれを用いた成膜装置
Abstract: front page image
(EN)An annular member (10) as in a first embodiment of the present invention surrounds the periphery of a substrate to be processed (2). The annular member (10) comprises a ceramic sintered compact or quartz glass, and is provided with an annular body (11) having at least one main surface (S1). The body (11) has a grooved part (G) arranged on the one main surface (S1) and a plurality of protuberances (14) projecting from a bottom surface (B) of the grooved part (G). This film-forming device (1) is provided with the annular member (10) and a reaction chamber (4) arranged within the annular member (10). A metallic film (3) is formed on the substrate to be processed (2) in the reaction chamber (4).
(FR)La présente invention concerne, dans un premier mode de réalisation, un élément annulaire (10) entourant la périphérie d'un substrat devant être traité (2). L'élément annulaire (10) comprend un verre de quartz ou compact fritté de céramique, et est doté d'un corps annulaire (11) ayant au moins une surface principale (S1). Le corps (11) a une partie rainurée (G) agencée sur ladite surface principale (S1) et une pluralité de protubérances (14) faisant saillie à partir d'une surface inférieure (B) de la partie rainurée (G). Le dispositif de formation de film (1) selon l'invention est doté de l'élément annulaire (10) et d'une chambre de réaction (4) agencée à l'intérieur de l'élément annulaire (10). Un film métallique (3) est formé sur le substrat devant être traité (2) dans la chambre de réaction (4).
(JA) 本発明の一態様に係る環状部材10は、被処理基板2の周囲を取り囲むものである。環状部材10は、セラミック焼結体または石英ガラスからなり、少なくとも一主面S1を有する環状の本体11を備える。本体11は、一主面S1に配された溝部Gと、溝部Gの底面Bから突出した複数の突起14とを有する。本発明の一態様に係る成膜装置1は、環状部材10と、環状部材10が内部に配された、被処理基板2への金属膜3の成膜が行なわれる反応室4とを備えており、環状部材10の溝部Gは、反応室4内に露出している。
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)