WIPO logo
Mobile | Deutsch | Español | Français | 日本語 | 한국어 | Português | Русский | 中文 | العربية |
PATENTSCOPE

Search International and National Patent Collections
World Intellectual Property Organization
Search
 
Browse
 
Translate
 
Options
 
News
 
Login
 
Help
 
Machine translation
1. (WO2013144691) LASER APPARATUS AND EXTREME-ULTRAVIOLET LIGHT GENERATION SYSTEM USING THE SAME
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2013/144691    International Application No.:    PCT/IB2013/000181
Publication Date: 03.10.2013 International Filing Date: 13.02.2013
IPC:
H01S 3/23 (2006.01), H01S 3/223 (2006.01), H01S 3/00 (2006.01), G02B 26/08 (2006.01), G02B 27/09 (2006.01), H01S 3/034 (2006.01), H01S 3/083 (2006.01)
Applicants: GIGAPHOTON INC. [JP/JP]; 400 Yokokurashinden Oyama-shi Tochigi 3238558 (JP).
WAKABAYASHI, Osamu [JP/JP]; (JP).
NOWAK, Krzysztof [PL/JP]; (JP)
Inventors: WAKABAYASHI, Osamu; (JP).
NOWAK, Krzysztof; (JP)
Priority Data:
61/618,296 30.03.2012 US
2012-271082 12.12.2012 JP
Title (EN) LASER APPARATUS AND EXTREME-ULTRAVIOLET LIGHT GENERATION SYSTEM USING THE SAME
(FR) AMPLIFICATEUR, APPAREIL LASER ET SYSTÈME DE GÉNÉRATION DE LUMIÈRE EN ULTRAVIOLET EXTRÊME
Abstract: front page image
(EN)An amplifier PAκ including a plurality of discharge tubes and a MOPA laser apparatus including a master oscillator as a seed laser configured to output a pulsed laser beam, at least one of said amplifier PAκ comprising a plurality of discharge tubes provided on a designated path of the pulsed laser beam, and an optical system comprising mirrors arranged between said discharge tubes and/or said at least one amplifiers when more than one, to steer the seed laser beam so that it travels along the designed path.
(FR)La présente invention porte sur un amplificateur qui peut comprendre une pluralité de tubes de décharge agencés dans un trajet déterminé d'un faisceau laser de germe et un système optique agencé pour diriger le faisceau laser de germe pour se propager le long du trajet déterminé.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)