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1. (WO2013144691) LASER APPARATUS AND EXTREME-ULTRAVIOLET LIGHT GENERATION SYSTEM USING THE SAME
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2013/144691 International Application No.: PCT/IB2013/000181
Publication Date: 03.10.2013 International Filing Date: 13.02.2013
IPC:
H01S 3/23 (2006.01) ,H01S 3/223 (2006.01) ,H01S 3/00 (2006.01) ,G02B 26/08 (2006.01) ,G02B 27/09 (2006.01) ,H01S 3/034 (2006.01) ,H01S 3/083 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
S
DEVICES USING STIMULATED EMISSION
3
Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves
23
Arrangement of two or more lasers not provided for in groups H01S3/02-H01S3/14113
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
S
DEVICES USING STIMULATED EMISSION
3
Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves
14
characterised by the material used as the active medium
22
Gases
223
the active gas being polyatomic, i.e. containing more than one atom
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
S
DEVICES USING STIMULATED EMISSION
3
Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
26
Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
08
for controlling the direction of light
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
27
Other optical systems; Other optical apparatus
09
Beam shaping, e.g. changing the cross-sectioned area, not otherwise provided for
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
S
DEVICES USING STIMULATED EMISSION
3
Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves
02
Constructional details
03
of gas laser discharge tubes
034
Optical devices within, or forming part of, the tube, e.g. windows, mirrors
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
S
DEVICES USING STIMULATED EMISSION
3
Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves
05
Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
08
Construction or shape of optical resonators or components thereof
081
comprising more than two reflectors
083
Ring lasers
Applicants:
WAKABAYASHI, Osamu [JP/JP]; JP
NOWAK, Krzysztof [PL/JP]; JP
GIGAPHOTON INC. [JP/JP]; 400 Yokokurashinden Oyama-shi Tochigi 3238558, JP
Inventors:
WAKABAYASHI, Osamu; JP
NOWAK, Krzysztof; JP
Priority Data:
2012-27108212.12.2012JP
61/618,29630.03.2012US
Title (EN) LASER APPARATUS AND EXTREME-ULTRAVIOLET LIGHT GENERATION SYSTEM USING THE SAME
(FR) AMPLIFICATEUR, APPAREIL LASER ET SYSTÈME DE GÉNÉRATION DE LUMIÈRE EN ULTRAVIOLET EXTRÊME
Abstract:
(EN) An amplifier PAκ including a plurality of discharge tubes and a MOPA laser apparatus including a master oscillator as a seed laser configured to output a pulsed laser beam, at least one of said amplifier PAκ comprising a plurality of discharge tubes provided on a designated path of the pulsed laser beam, and an optical system comprising mirrors arranged between said discharge tubes and/or said at least one amplifiers when more than one, to steer the seed laser beam so that it travels along the designed path.
(FR) La présente invention porte sur un amplificateur qui peut comprendre une pluralité de tubes de décharge agencés dans un trajet déterminé d'un faisceau laser de germe et un système optique agencé pour diriger le faisceau laser de germe pour se propager le long du trajet déterminé.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)