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1. (WO2013144375) SEMICONDUCTOR DEVICE AND METHOD FOR PRODUCING A GLASS-LIKE LAYER

Pub. No.:    WO/2013/144375    International Application No.:    PCT/EP2013/056950
Publication Date: Fri Oct 04 01:59:59 CEST 2013 International Filing Date: Wed Apr 03 01:59:59 CEST 2013
IPC: H01L 21/02
H01L 21/316
Applicants: MSG LITHOGLAS GMBH
Inventors: MAUS, Simon
HANSEN, Ulli
Title: SEMICONDUCTOR DEVICE AND METHOD FOR PRODUCING A GLASS-LIKE LAYER
Abstract:
The invention discloses a method for producing a glass-like layer (3) on a substrate, such as a power semiconductor substrate (1), consisting of a glass-like vapour deposition coating material by means of plasma-assisted electron beam vapour deposition. An electronic construction element can be produced using this method.