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1. WO2013141326 - ELECTROMAGNETIC WAVE PULSE MEASURING DEVICE AND METHOD, AND APPLICATION DEVICE USING THE SAME

Publication Number WO/2013/141326
Publication Date 26.09.2013
International Application No. PCT/JP2013/058175
International Filing Date 13.03.2013
IPC
G01N 29/06 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
29Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
04Analysing solids
06Visualisation of the interior, e.g. acoustic microscopy
G01H 9/00 2006.01
GPHYSICS
01MEASURING; TESTING
HMEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
9Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
G01N 29/07 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
29Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
04Analysing solids
07by measuring propagation velocity or propagation time of acoustic waves
G01N 29/11 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
29Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
04Analysing solids
11by measuring attenuation of acoustic waves
G01N 29/24 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
29Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
22Details
24Probes
G01N 29/34 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
29Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
34Generating the ultrasonic, sonic or infrasonic waves
CPC
G01H 9/00
GPHYSICS
01MEASURING; TESTING
HMEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
9Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
G01N 21/1717
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
1717with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
G01N 21/3586
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
35using infra-red light
3581using far infra-red light; using Terahertz radiation
3586by Terahertz time domain spectroscopy [THz-TDS]
G01N 21/4795
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
47Scattering, i.e. diffuse reflection
4795spatially resolved investigating of object in scattering medium
G01N 2201/06113
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
2201Features of devices classified in G01N21/00
06Illumination; Optics
061Sources
06113Coherent sources; lasers
G01N 2201/067
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
2201Features of devices classified in G01N21/00
06Illumination; Optics
067Electro-optic, magneto-optic, acousto-optic elements
Applicants
  • CANON KABUSHIKI KAISHA [JP]/[JP]
Inventors
  • KUBOTA, Oichi
Agents
  • OKABE, Yuzuru
Priority Data
2012-06139119.03.2012JP
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) ELECTROMAGNETIC WAVE PULSE MEASURING DEVICE AND METHOD, AND APPLICATION DEVICE USING THE SAME
(FR) DISPOSITIF ET PROCÉDÉ DE MESURE D'IMPULSIONS D'ONDE ÉLECTROMAGNÉTIQUE, ET DISPOSITIF D'APPLICATION UTILISANT LE DISPOSITIF ET LE PROCÉDÉ
Abstract
(EN)
An electromagnetic wave pulse measuring device, includes an elastic vibration wave generating section which irradiates a predetermined area of a sample with an elastic vibration wave, an electromagnetic wave pulse generating section which irradiates the predetermined area, which is irradiated with the elastic vibration wave, with an electromagnetic wave pulse, and an electromagnetic wave pulse detecting section which measures a waveform of the electromagnetic wave pulse modulated in the predetermined area by the elastic vibration wave. The timing at which the electromagnetic wave pulse detecting section measures the waveform of the electromagnetic wave pulse is a timing at which a phase angle of the elastic vibration wave has a predetermined value when the elastic vibration wave generating section generates the elastic vibration wave.
(FR)
La présente invention concerne un dispositif de mesure d'impulsions d'onde électromagnétique, comportant une section de génération d'onde de vibration élastique qui irradie une zone prédéterminée d'un échantillon avec une onde de vibration élastique, une section de génération d'impulsions d'onde électromagnétique qui irradie la zone prédéterminée, qui est irradiée avec l'onde de vibration élastique, avec une impulsion d'onde électromagnétique, et une section de détection d'impulsions d'onde électromagnétique qui mesure une forme d'onde de l'impulsion d'onde électromagnétique modulée dans la zone prédéterminée par l'onde de vibration élastique. L'instant où la section de détection d'impulsions d'onde électromagnétique mesure la forme d'onde de l'impulsion d'onde électromagnétique est un instant où un angle de phase de l'onde de vibration élastique a une valeur prédéterminée lorsque la section de génération d'onde de vibration élastique génère l'onde de vibration élastique.
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