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1. WO2013141254 - OXIDE SINTERED BODY AND SPUTTERING TARGET, AND METHOD FOR MANUFACTURING SAME

Publication Number WO/2013/141254
Publication Date 26.09.2013
International Application No. PCT/JP2013/057879
International Filing Date 19.03.2013
IPC
C23C 14/34 2006.01
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
34Sputtering
C04B 35/00 2006.01
CCHEMISTRY; METALLURGY
04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
BLIME; MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
35Shaped ceramic products characterised by their composition; Ceramic compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
H01M 4/525 2010.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
4Electrodes
02Electrodes composed of, or comprising, active material
36Selection of substances as active materials, active masses, active liquids
48of inorganic oxides or hydroxides
52of nickel, cobalt or iron
525of mixed oxides or hydroxides containing iron, cobalt or nickel for inserting or intercalating light metals, e.g. LiNiO2, LiCoO2 or LiCoOxFy
CPC
B28B 3/025
BPERFORMING OPERATIONS; TRANSPORTING
28WORKING CEMENT, CLAY, OR STONE
BSHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
3Producing shaped articles from the material by using presses
02wherein a ram exerts pressure on the material in a moulding space; Ram heads of special form
025Hot pressing, e.g. of ceramic materials
C04B 2235/3203
CCHEMISTRY; METALLURGY
04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
2235Aspects relating to ceramic starting mixtures or sintered ceramic products
02Composition of constituents of the starting material or of secondary phases of the final product
30Constituents and secondary phases not being of a fibrous nature
32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
3201Alkali metal oxides or oxide-forming salts thereof
3203Lithium oxide or oxide-forming salts thereof
C04B 2235/3275
CCHEMISTRY; METALLURGY
04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
2235Aspects relating to ceramic starting mixtures or sintered ceramic products
02Composition of constituents of the starting material or of secondary phases of the final product
30Constituents and secondary phases not being of a fibrous nature
32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
327Iron group oxides, their mixed metal oxides, or oxide-forming salts thereof
3275Cobalt oxides, cobaltates or cobaltites or oxide forming salts thereof, e.g. bismuth cobaltate, zinc cobaltite
C04B 2235/3279
CCHEMISTRY; METALLURGY
04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
2235Aspects relating to ceramic starting mixtures or sintered ceramic products
02Composition of constituents of the starting material or of secondary phases of the final product
30Constituents and secondary phases not being of a fibrous nature
32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
327Iron group oxides, their mixed metal oxides, or oxide-forming salts thereof
3279Nickel oxides, nickalates, or oxide-forming salts thereof
C04B 2235/652
CCHEMISTRY; METALLURGY
04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
2235Aspects relating to ceramic starting mixtures or sintered ceramic products
65Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
652Reduction treatment
C04B 2235/6567
CCHEMISTRY; METALLURGY
04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
2235Aspects relating to ceramic starting mixtures or sintered ceramic products
65Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
656characterised by specific heating conditions during heat treatment
6567Treatment time
Applicants
  • 株式会社コベルコ科研 KOBELCO RESEARCH INSTITUTE, INC. [JP]/[JP]
  • 株式会社豊島製作所 TOSHIMA MANUFACTURING CO., LTD. [JP]/[JP]
Inventors
  • 武富 雄一 TAKETOMI, Yuichi
  • 田尾 幸樹 TAO, Yuki
  • 金丸 守賀 KANAMARU, Moriyoshi
  • 坂井 健二 SAKAI, Kenji
  • 長谷山 秀悦 HASEYAMA, Shuetsu
  • 菊山 英志 KIKUYAMA, Hideshi
Agents
  • 植木 久一 UEKI, Kyuichi
Priority Data
2012-06447521.03.2012JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) OXIDE SINTERED BODY AND SPUTTERING TARGET, AND METHOD FOR MANUFACTURING SAME
(FR) CORPS FRITTÉ D'OXYDE ET CIBLE DE PULVÉRISATION CATHODIQUE, ET PROCÉDÉ DE FABRICATION ASSOCIÉ
(JA) 酸化物焼結体およびスパッタリングターゲット、並びにその製造方法
Abstract
(EN)
The amounts of the impurity elements Al, Si, Zr, Ca, and Y in this Li-containing transition metal oxide sintered body are kept to the following ranges: 90 ppm or less Al, 100 ppm or less Si, 100 ppm or less Zr, 80 ppm or less Ca, and 20 ppm or less Y. The Li-containing transition metal oxide sintered body maintains a relative density of at least 95%, and a resistivity of less than 2×107 Ωcm. According to the present invention, a Li-containing transition metal oxide thin film that is useful as a positive-electrode thin film for a secondary cell or the like can be formed stably and rapidly without any irregular discharge.
(FR)
Les quantités des éléments d'impuretés Al, Si, Zr, Ca, et Y dans ce corps fritté d'oxyde métallique de transition contenant du Li sont maintenues dans les plages suivantes : 90 ppm ou moins d'Al, 100 ppm ou moins de Si, 100 ppm ou moins de Zr, 80 ppm ou moins de Ca, et 20 ppm ou moins de Y. Le corps fritté d'oxyde métallique de transition contenant du Li maintient une densité relative d'au moins 95 %, et une résistivité inférieure à 2 × 107 Ωcm. Selon la présente invention, un film mince d'oxyde métallique de transition contenant du Li, qui est utile en tant que film mince d'électrode positive pour une cellule secondaire ou analogue peut être formé de manière stable et rapide, sans aucune décharge irrégulière.
(JA)
 本発明のLi含有遷移金属酸化物焼結体は、不純物元素であるAl、Si、Zr、Ca、およびYが、Al≦90ppm、Si≦100ppm、Zr≦100ppm、Ca≦80ppm、Y≦20ppmの範囲に抑制されており、且つ、相対密度95%以上、および比抵抗2×107Ωcm未満を満足するものである。本発明によれば、二次電池などの正極薄膜として有用なLi含有遷移金属酸化物薄膜を、異常放電が発生することなく安定して、高い成膜速度で成膜することができる。
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