Search International and National Patent Collections

1. (WO2013125792) SYSTEM FOR SEPARATING AND REUSING PERFLUOROCARBON COMPOUND

Pub. No.:    WO/2013/125792    International Application No.:    PCT/KR2013/000479
Publication Date: Fri Aug 30 01:59:59 CEST 2013 International Filing Date: Tue Jan 22 00:59:59 CET 2013
IPC: B01D 53/68
B01D 53/02
B01D 53/78
B01D 50/00
Applicants: FINETECH.CO.,LTD
(주) 파인텍
Inventors: ROH, Young-Seok
노영석
Title: SYSTEM FOR SEPARATING AND REUSING PERFLUOROCARBON COMPOUND
Abstract:
The present invention relates to a system for separating and reusing a perfluorocarbon compound, developed so as to effectively separate, discard or reuse a perfluorocarbon compound comprising sulfur hexafluoride, the perfluorocarbon compound being generated primarily during manufacturing of semiconductors. The system, for separating and reusing a perfluorocarbon compound, which handles gas comprising dust generated by discharge gas-emitting installations using or generating perfluorocarbons, such as a dry-etching process and a CVD cleansing chamber, comprises a first dry pump, a pre-processing filter, a membrane separation filter, a nitrogen reuse supply unit, a sulfur hexafluoride reuse supply unit, and a control unit, and thus facilitates separation and removal of a variety of gases and dust comprising perfluorocarbons generated by the electronics industry, and allows reuse of sulfur hexafluoride by separating same from the discharge gas and reprocessing same, thereby raising the effectiveness of discharge gas separation.