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1. (WO2013125791) SYSTEM FOR SEPARATING AND REUSING PERFLUOROCARBON COMPOUND
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2013/125791 International Application No.: PCT/KR2013/000477
Publication Date: 29.08.2013 International Filing Date: 21.01.2013
IPC:
B01D 53/68 (2006.01) ,B01D 53/02 (2006.01) ,B01D 53/78 (2006.01) ,B01D 53/75 (2006.01)
B PERFORMING OPERATIONS; TRANSPORTING
01
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
D
SEPARATION
53
Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols
34
Chemical or biological purification of waste gases
46
Removing components of defined structure
68
Halogens or halogen compounds
B PERFORMING OPERATIONS; TRANSPORTING
01
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
D
SEPARATION
53
Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols
02
by adsorption, e.g. preparative gas chromatography
B PERFORMING OPERATIONS; TRANSPORTING
01
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
D
SEPARATION
53
Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols
34
Chemical or biological purification of waste gases
74
General processes for purification of waste gases; Apparatus or devices specially adapted therefor
77
Liquid phase processes
78
with gas-liquid contact
B PERFORMING OPERATIONS; TRANSPORTING
01
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
D
SEPARATION
53
Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols
34
Chemical or biological purification of waste gases
74
General processes for purification of waste gases; Apparatus or devices specially adapted therefor
75
Multi-step processes
Applicants:
(주) 파인텍 FINETECH.CO.,LTD [KR/KR]; 경기도 평택시 진위면 청호리 330-4 330-4 Cheongho-ri, Jinwi-myeon Pyeongtaek-si Gyeonggi-do 451-862, KR
Inventors:
노영석 ROH, Young-Seok; KR
Agent:
고승호 GO, Seung-Ho; 서울시 금천구 디지털로 9길 33, IT 미래타워 210ho, IT Mirae Tower 33 Digital-ro 9-gil, Geumcheon-gu Seoul 153-760, KR
Priority Data:
10-2012-001842123.02.2012KR
Title (EN) SYSTEM FOR SEPARATING AND REUSING PERFLUOROCARBON COMPOUND
(FR) SYSTÈME POUR SÉPARER ET RÉUTILISER UN COMPOSÉ DE PERFLUOROCARBONE
(KO) 과불화화합물의 분리 및 재활용시스템
Abstract:
(EN) The present invention relates to a system for separating and reusing a perfluorocarbon compound, developed so as to effectively separate, discard or reuse a perfluorocarbon compound comprising sulfur hexafluoride, the perfluorocarbon compound being generated primarily during manufacturing of semiconductors. The system, for separating and reusing a perfluorocarbon compound, which handles gas comprising dust generated by discharge gas-emitting installations using or generating perfluorocarbons, such as a dry-etching process and a CVD cleansing chamber, comprises a first dry pump, a pre-processing filter, a membrane separation filter, a nitrogen reuse supply unit, a sulfur hexafluoride reuse supply unit, and a control unit, and thus facilitates separation and removal of a variety of gases and dust comprising perfluorocarbons generated by the electronics industry, and allows reuse of sulfur hexafluoride by separating same from the discharge gas and reprocessing same.
(FR) La présente invention concerne un système pour séparer et réutiliser un composé de perfluorocarbone, mis au point pour séparer, éliminer et réutiliser de manière efficace un composé de perfluorocarbone comprenant de l'hexafluorure de soufre, le composé de perfluorocarbone étant généré principalement pendant la fabrication de semiconducteurs. Le système pour séparer et réutiliser un composé de perfluorocarbone qui utilise du gaz comprenant de la poussière générée par des installations émettant des gaz d'échappement utilisant ou générant des perfluorocarbones, telle qu'une chambre de gravure à sec et de nettoyage par dépôt chimique en phase vapeur, comprend une première pompe désamorcée, un filtre de pré-traitement, un filtre de séparation par membrane, une unité d'alimentation à recyclage de l'azote, une unité d'alimentation à recyclage de hexafluorure de soufre et une unité de commande. Ainsi, ce système facilite la séparation et l'extraction d'une variété de gaz et de poussière comprenant des perfluorocarbones générés par l'industrie de l'électronique, et il permet le recyclage de l'hexafluorure de soufre par séparation de ce dernier du gaz d'échappement puis retraitement.
(KO) 본 발명은 과불화화합물의 분리 및 재활용시스템에 관한 것으로서, 주로 반도체 생산공정에서 발생하는 육불화황을 포함하는 과불화화합물을 효과적으로 분리하고 이를 제거 또는 재활용할 수 있도록 하기 위하여 개발된 것으로; 드라이 에칭공정과 CVD 세정 챔버 등의 과불화화합물을 이용하거나 생성되는 배가스 발생시설에서 발생하는 분진을 포함하는 가스를 처리하는 과불화화합물의 분리 및 재활용시스템에 있어서; 제1 드라이 펌프, 전처리 필터, 막분리 필터, 질소 재활용 공급부, 육불화황 재활용 공급부, 제어부로 구성되어 전자산업에서 생성되는 과불화화합물을 포함하는 각종 가스 및 분진을 용이하게 분리하고 제거할 수 있고, 배가스에서 육불화황과 질소를 분리하고 재처리하여 사용할 수 있는 과불화화합물 분리 및 재활용시스템을 개발하는 것에 있다.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: Korean (KO)
Filing Language: Korean (KO)