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1. (WO2013125734) BOLOMETER AND MANUFACTURING METHOD THEREOF
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2013/125734    International Application No.:    PCT/JP2013/055607
Publication Date: 29.08.2013 International Filing Date: 22.02.2013
IPC:
G01J 1/02 (2006.01)
Applicants: NEC Corporation [JP/JP]; 7-1, Shiba 5-chome, Minato-ku, Tokyo 1088001 (JP) (For All Designated States Except US).
ALTINTAS Ersin [TR/JP]; (JP) (US only).
NARITA Kaoru [JP/JP]; (JP) (US only)
Inventors: ALTINTAS Ersin; (JP).
NARITA Kaoru; (JP)
Agent: TANAI Sumio; 1-9-2, Marunouchi, Chiyoda-ku, Tokyo 1006620 (JP)
Priority Data:
2012-038750 24.02.2012 JP
Title (EN) BOLOMETER AND MANUFACTURING METHOD THEREOF
(FR) BOLOMÈTRE ET SON PROCÉDÉ DE FABRICATION
Abstract: front page image
(EN)The present invention is related to the field of uncooled infrared (IR) or terahertz (THz) bolometers, and especially to low-cost bolometers and their fabrication processes. The device is composed of a photodefinable substrate which enables to suspend a bolometer structure on a diaphragm layer using wet etching technology with a good thermal isolation.
(FR)La présente invention est liée au domaine des bolomètres infrarouge non refroidi ( IR ) ou térahertz ( THz ), et en particulier les bolomètres à faible coût et leurs procédés de fabrication.. Le dispositif est composé d'un substrat photodéfinissable qui permet de suspendre une structure de bolomètre sur une couche diaphragme à l' aide d' une technologie de gravure humide avec une bonne isolation thermique.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)