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1. (WO2013125734) BOLOMETER AND MANUFACTURING METHOD THEREOF

Pub. No.:    WO/2013/125734    International Application No.:    PCT/JP2013/055607
Publication Date: Fri Aug 30 01:59:59 CEST 2013 International Filing Date: Sat Feb 23 00:59:59 CET 2013
IPC: G01J 1/02
Applicants: NEC Corporation
ALTINTAS Ersin
NARITA Kaoru
Inventors: ALTINTAS Ersin
NARITA Kaoru
Title: BOLOMETER AND MANUFACTURING METHOD THEREOF
Abstract:
The present invention is related to the field of uncooled infrared (IR) or terahertz (THz) bolometers, and especially to low-cost bolometers and their fabrication processes. The device is composed of a photodefinable substrate which enables to suspend a bolometer structure on a diaphragm layer using wet etching technology with a good thermal isolation.