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1. (WO2013125364) FLUID CONTROL DEVICE

Pub. No.:    WO/2013/125364    International Application No.:    PCT/JP2013/052988
Publication Date: Fri Aug 30 01:59:59 CEST 2013 International Filing Date: Sat Feb 09 00:59:59 CET 2013
IPC: F04B 43/04
F04B 43/02
F04B 45/047
Applicants: MURATA MANUFACTURING CO., LTD.
株式会社村田製作所
Inventors: KAMITANI, Gaku
神谷岳
FUJISAKI, Masaaki
藤崎雅章
Title: FLUID CONTROL DEVICE
Abstract:
The fluid control device (100) is provided with a piezoelectric pump (101), a controller (111), and a drive circuit (112). The fluid control device (100) is connected to an air reservoir (109). The drive circuit (112) applies a first drive voltage or a second drive voltage, obtained by superimposing each of different direct current bias voltages onto an alternating current voltage, to a piezoelectric element (42) of the piezoelectric pump (101). In the fluid control device (100), the height of the direct current bias voltage is switched by switching the voltage applied to the piezoelectric element (42) from the first drive voltage to the second drive voltage. The gap between a piezoelectric actuator (40) and a flexible plate (51) when the piezoelectric actuator (40) is at the center of oscillation is thereby switched from a first gap (K1) to a second gap (K2). Consequently, the PQ characteristics of the piezoelectric pump (101) in the fluid control device (100) can be varied dynamically during driving of the piezoelectric pump (101).