Search International and National Patent Collections

1. (WO2013125262) METHOD FOR REFINING TRIMETHYLSILANE

Pub. No.:    WO/2013/125262    International Application No.:    PCT/JP2013/050639
Publication Date: Fri Aug 30 01:59:59 CEST 2013 International Filing Date: Thu Jan 17 00:59:59 CET 2013
IPC: C07F 7/20
C07F 7/08
Applicants: CENTRAL GLASS COMPANY, LIMITED
セントラル硝子株式会社
Inventors: TESHIMA, Takuya
手島 卓也
SHIBAYAMA, Takaaki
柴山 茂朗
NAKAMURA, Yosuke
中村 陽介
HIRAOKA, Tomoyuki
平岡 知之
Title: METHOD FOR REFINING TRIMETHYLSILANE
Abstract:
Provided is a method for refining trimethylsilane which comprises (1) a step of preparing an activated carbon impregnated with at least copper oxide (II) and zinc oxide, (2) a step of adsorbing trimethylsilane to the activated carbon, and (3) a step of contacting trimethylsilane which contains silane, methylsilane or dimethylsilane as an impurity with the activated carbon that has undergone the step (2) and adsorbing the impurity thereto in order to remove the impurity from the trimethylsilane. According to this method, generation of heat from the activated carbon is suppressed and impurities such as dimethylsilane can be removed efficiently.