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1. (WO2013125259) FERROMAGNETIC MATERIAL SPUTTERING TARGET CONTAINING CHROME OXIDE
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2013/125259 International Application No.: PCT/JP2013/050530
Publication Date: 29.08.2013 International Filing Date: 15.01.2013
Chapter 2 Demand Filed: 08.05.2013
IPC:
C23C 14/34 (2006.01) ,G11B 5/64 (2006.01) ,G11B 5/65 (2006.01) ,G11B 5/851 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
34
Sputtering
G PHYSICS
11
INFORMATION STORAGE
B
INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
5
Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
62
Record carriers characterised by the selection of the material
64
comprising only the magnetic material without bonding agent
G PHYSICS
11
INFORMATION STORAGE
B
INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
5
Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
62
Record carriers characterised by the selection of the material
64
comprising only the magnetic material without bonding agent
65
characterised by its composition
G PHYSICS
11
INFORMATION STORAGE
B
INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
5
Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
84
Processes or apparatus specially adapted for manufacturing record carriers
851
Coating a support with a magnetic layer by sputtering
Applicants:
JX日鉱日石金属株式会社 JX NIPPON MINING & METALS CORPORATION [JP/JP]; 東京都千代田区大手町二丁目6番3号 6-3, Otemachi 2-chome, Chiyoda-ku, Tokyo 1008164, JP
Inventors:
高見 英生 TAKAMI Hideo; JP
荒川 篤俊 ARAKAWA Atsutoshi; JP
Agent:
小越 勇 OGOSHI Isamu; 東京都港区虎ノ門2丁目9番14号 発明会館5階 小越国際特許事務所 OGOSHI International Patent Office, HATSUMEIKAIKAN 5F, 9-14, Toranomon 2-chome, Minato-ku, Tokyo 1050001, JP
Priority Data:
2012-03723523.02.2012JP
Title (EN) FERROMAGNETIC MATERIAL SPUTTERING TARGET CONTAINING CHROME OXIDE
(FR) CIBLE DE PULVÉRISATION FERROMAGNÉTIQUE CONTENANT UN OXYDE DE CHROME
(JA) クロム酸化物を含有する強磁性材スパッタリングターゲット
Abstract:
(EN) A ferromagnetic material sputtering target containing a matrix phase comprising cobalt, cobalt and chrome, cobalt and platinum, or cobalt, chrome and platinum, and an oxide phase including at least a chrome oxide. The ferromagnetic material sputtering target is characterized by containing a total content of 100-15,000 wt ppm of at least one type of either Zr or W, and by having a relative density of at least 97%. The present invention addresses the problem of providing a ferromagnetic material sputtering target that maintains a high density, uniformly miniaturizes oxide phase particles, and contains a chrome oxide having little generation of particles.
(FR)  L'invention concerne une cible de pulvérisation comportant: une phase matricielle constituée de cobalt, de cobalt et de chrome, de cobalt et de platine, ou encore de cobalt, de chrome et de platine; ainsi qu'une phase oxyde contenant au moins un oxyde de chrome. Plus spécifiquement, cette cible de pulvérisation ferromagnétique se caractérise en ce qu'elle contient au moins un élément parmi Zr et W, dans une quantité totale supérieure ou égale à 100 ppm en poids et inférieure ou égale à 15000 ppm en poids et en ce que sa densité relative est supérieure ou égale à 97 %. Cette cible de pulvérisation ferromagnétique permet de maintenir une densité élevée, présente une phase oxyde à micro-particules uniformes et contient un oxyde de chrome générant peu de particules.
(JA)  コバルト、或いはコバルト、クロム、或いはコバルト、白金、或いはコバルト、クロム、白金からなるマトリックス相と、少なくともクロム酸化物を含む酸化物相を含有するスパッタリングターゲットであって、Zr、Wのうちいずれか1種以上を合計で100wtppm以上15000wtppm以下含有し、相対密度が97%以上であることを特徴とする強磁性材スパッタリングターゲット。高密度を維持しつつ、酸化物相の粒子を一律に微細化した、パーティクルの発生の少ないクロム酸化物を含有する強磁性材スパッタリングターゲットを提供することを課題とする。
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)