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1. (WO2013124394) METHOD FOR PRODUCING A SOLAR CELL
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2013/124394 International Application No.: PCT/EP2013/053515
Publication Date: 29.08.2013 International Filing Date: 22.02.2013
Chapter 2 Demand Filed: 18.12.2013
IPC:
H01L 31/0216 (2006.01) ,H01L 31/18 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
31
Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
02
Details
0216
Coatings
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
31
Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
18
Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
Applicants:
FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V. [DE/DE]; Hansastrasse 27c 80686 München, DE
Inventors:
MOSCHNER, Jens Dirk; DE
NAGEL, Henning; DE
LACHOWICZ, Agata; DE
FIEDLER, Markus; DE
Agent:
STOFFREGEN, Hans-Herbert; Friedrich-Ebert-Anlage 11b 63450 Hanau, DE
Priority Data:
10 2012 101 456.623.02.2012DE
Title (EN) METHOD FOR PRODUCING A SOLAR CELL
(FR) PROCÉDÉ DE FABRICATION D'UNE CELLULE SOLAIRE
(DE) VERFAHREN ZUM HERSTELLEN EINER SOLARZELLE
Abstract:
(EN) The invention relates to a method for producing a solar cell having a substrate made of silicon, which substrate has a silicon oxide layer present on the surface of the substrate and an antireflection layer applied to the silicon oxide layer, which antireflection layer is deposited onto the dielectric passivation layer in a process chamber. According to the invention, in order to achieve a stability of corresponding solar cells or solar cell modules produced therefrom against a potential induced degradation (PID), the dielectric passivation layer is formed from the surface of the substrate in the process chamber by means of a plasma containing an oxidizing gas.
(FR) L'invention concerne un procédé de fabrication d'une cellule solaire avec un substrat constitué de silicium comprenant une couche d'oxyde de silicium présente sur la surface du substrat et sur laquelle est appliquée une couche antireflet qui est déposée sur la couche de passivation diélectrique dans une chambre de traitement. L'invention vise à conférer auxdites cellules solaires ou aux modules constitués desdites cellules solaires une stabilité contre une dégradation induite par le potentiel (PID). A cet effet, la couche de passivation diélectrique est formée dans la chambre de traitement à partir de la surface du substrat au moyen d'un plasma contenant un gaz oxydant.
(DE) Die Erfindung bezieht sich auf ein Verfahren zum Herstellen einer Solarzelle mit einem aus Silicium bestehenden Substrat mit einer auf der Oberfläche des Substrats vorhandenen Siliciumoxidschicht und einer auf dieser aufgebrachten Antireflexionsschicht, die in einem Prozessraum auf die dielektrische Passivierungsschicht abgeschieden wird. Um eine Stabilität entsprechender Solarzellen bzw. der daraus gefertigten Solarzellenmodule gegen eine potential induzierte Degradation (PID) zu erzielen, wird vorgeschlagen, dass die dielektrische Passivierungsschicht aus der Oberfläche des Substrats in dem Prozessraum mittels eines ein oxidierendes Gas enthaltenden Plasmas ausgebildet wird.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: German (DE)
Filing Language: German (DE)