WIPO logo
Mobile | Deutsch | Español | Français | 日本語 | 한국어 | Português | Русский | 中文 | العربية |
PATENTSCOPE

Search International and National Patent Collections
World Intellectual Property Organization
Options
Query Language
Stem
Sort by:
List Length
Some content of this application is unavailable at the moment.
If this situation persist, please contact us atFeedback&Contact
1. (WO2013124101) FUEL STREAM GENERATOR, SOURCE COLLECTOR APPARATUS AND LITHOGRAPHIC APPARATUS
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2013/124101 International Application No.: PCT/EP2013/051093
Publication Date: 29.08.2013 International Filing Date: 22.01.2013
IPC:
G03F 7/20 (2006.01) ,H05G 2/00 (2006.01)
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20
Exposure; Apparatus therefor
H ELECTRICITY
05
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
G
X-RAY TECHNIQUE
2
Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
Applicants: ASML NETHERLANDS B.V.[NL/NL]; P.O. Box 324 NL-5500 AH Veldhoven, NL
Inventors: SCHIMMEL, Hendrikus, Gijsbertus; NL
LABETSKI, Dzmitry; NL
Agent: SIEM, Max Yoe Shé; P.O. Box 324 NL-5500 AH Veldhoven, NL
Priority Data:
61/601,72822.02.2012US
Title (EN) FUEL STREAM GENERATOR, SOURCE COLLECTOR APPARATUS AND LITHOGRAPHIC APPARATUS
(FR) GÉNÉRATEUR DE FLUX DE CARBURANT, APPAREIL COLLECTEUR DE SOURCE ET APPAREIL LITHOGRAPHIQUE
Abstract:
(EN) A fuel stream generator comprising a nozzle connected to a fuel reservoir, wherein the nozzle is provided with a gas inlet configured to provide a sheath of gas around fuel flowing along the nozzle is disclosed. Also disclosed are a method of generating fuel droplets and a lithography apparatus incorporating the fuel stream generator.
(FR) L'invention concerne un générateur de flux de carburant comprenant une buse raccordée à un réservoir de carburant, la buse étant dotée d'une entrée de gaz configurée pour fournir une enveloppe de gaz autour du carburant s'écoulant le long de la buse. L'invention concerne également un procédé de génération de gouttelettes de carburant et un appareil lithographique comprenant le générateur de flux de carburant.
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)