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Machine translation
1. (WO2013124052) LITHOGRAPHY DEVICE WITH EDDY-CURRENT BRAKE
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2013/124052    International Application No.:    PCT/EP2013/000480
Publication Date: 29.08.2013 International Filing Date: 19.02.2013
IPC:
G03F 7/20 (2006.01)
Applicants: CARL ZEISS SMT GMBH [DE/DE]; Rudolf-Eber Strasse 2 73447 Oberkochen (DE)
Inventors: VOGLER, Alexander; (DE).
HAUF, Markus; (DE)
Agent: HORN KLEIMANN WAITZHOFER; Ganghoferstr. 29a 80339 Munich (DE)
Priority Data:
10 2012 202 553.7 20.02.2012 DE
Title (EN) LITHOGRAPHY DEVICE WITH EDDY-CURRENT BRAKE
(FR) DISPOSITIF DE LITHOGRAPHIE À ENSEMBLE FREIN À COURANTS DE FOUCAULT
Abstract: front page image
(EN)A lithography device (10) includes an eddy-current brake (30, 70) for damping the movement of a structural element (13) of the lithography device (10). The eddy-current brake (30, 70) includes a plurality of magnets disposed in an arc-shaped arrangement, and a plurality of electrically conductive sheets (35, 67) arranged respectively between adjacent ones of said magnets. A relative movement between the magnets and the electrically conductive sheets in a direction to be damped inducing eddy currents in the electrically conductive sheets.
(FR)Un dispositif de lithographie (10) comprend un ensemble frein à courants de Foucault (30, 70) permettant d'amortir le mouvement d'un élément structural (13) du dispositif de lithographie (10). L'ensemble frein à courants de Foucault (30, 70) comprend une pluralité d'aimants disposés en un agencement en forme d'arc et une pluralité de feuilles électroconductrices (35, 67) respectivement agencées entre des aimants adjacents parmi lesdits aimants. Un mouvement relatif entre les aimants et les feuilles électroconductrices dans une direction devant être amortie induit des courants de Foucault dans les feuilles électroconductrices.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)