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Machine translation
1. (WO2013123997) IN-SITU ANNEALING IN ROLL TO ROLL SPUTTER WEB COATER AND METHOD OF OPERATING THEREOF
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2013/123997    International Application No.:    PCT/EP2012/053150
Publication Date: 29.08.2013 International Filing Date: 24.02.2012
IPC:
C23C 14/56 (2006.01), C23C 14/58 (2006.01)
Applicants: APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue Santa Clara, California 95054 (US) (For All Designated States Except US).
LOTZ, Hans-Georg [DE/DE]; (DE) (For US Only).
REUS, Armin [DE/DE]; (DE) (For US Only)
Inventors: LOTZ, Hans-Georg; (DE).
REUS, Armin; (DE)
Agent: ZIMMERMANN, Gerd; Zimmermann & Partner Josephspitalstr. 15 80331 München (DE)
Priority Data:
Title (EN) IN-SITU ANNEALING IN ROLL TO ROLL SPUTTER WEB COATER AND METHOD OF OPERATING THEREOF
(FR) RECUISSON IN SITU DANS UN DISPOSITIF DE REVÊTEMENT DE BANDE PAR PULVÉRISATION ROULEAU PAR ROULEAU ET PROCÉDÉ DE FONCTIONNEMENT DE CELUI-CI
Abstract: front page image
(EN)An apparatus for processing a flexible substrate is described. The apparatus includes an unwinding module configured for providing the flexible substrate, a deposition module configured for depositing a layer on the flexible substrate, an annealing module having one or more heaters configured for in-situ annealing the layer, and a winding module configured for winding of the substrate with the annealed layer.
(FR)L'invention concerne un appareil pour traiter un substrat flexible. L'appareil comprend un module de déroulement configuré pour fournir le substrat flexible, un module de déposition configuré pour déposer une couche sur le substrat flexible, un module de recuisson ayant un ou plusieurs éléments chauffants configurés pour la recuisson in-situ de la couche, et un module d'enroulement configuré pour enrouler le substrat avec la couche recuite.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)