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1. (WO2013123997) IN-SITU ANNEALING IN ROLL TO ROLL SPUTTER WEB COATER AND METHOD OF OPERATING THEREOF
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2013/123997 International Application No.: PCT/EP2012/053150
Publication Date: 29.08.2013 International Filing Date: 24.02.2012
IPC:
C23C 14/56 (2006.01) ,C23C 14/58 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
56
Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
58
After-treatment
Applicants: LOTZ, Hans-Georg[DE/DE]; DE (UsOnly)
REUS, Armin[DE/DE]; DE (UsOnly)
APPLIED MATERIALS, INC.[US/US]; 3050 Bowers Avenue Santa Clara, California 95054, US (AllExceptUS)
Inventors: LOTZ, Hans-Georg; DE
REUS, Armin; DE
Agent: ZIMMERMANN, Gerd; Zimmermann & Partner Josephspitalstr. 15 80331 München, DE
Priority Data:
Title (EN) IN-SITU ANNEALING IN ROLL TO ROLL SPUTTER WEB COATER AND METHOD OF OPERATING THEREOF
(FR) RECUISSON IN SITU DANS UN DISPOSITIF DE REVÊTEMENT DE BANDE PAR PULVÉRISATION ROULEAU PAR ROULEAU ET PROCÉDÉ DE FONCTIONNEMENT DE CELUI-CI
Abstract:
(EN) An apparatus for processing a flexible substrate is described. The apparatus includes an unwinding module configured for providing the flexible substrate, a deposition module configured for depositing a layer on the flexible substrate, an annealing module having one or more heaters configured for in-situ annealing the layer, and a winding module configured for winding of the substrate with the annealed layer.
(FR) L'invention concerne un appareil pour traiter un substrat flexible. L'appareil comprend un module de déroulement configuré pour fournir le substrat flexible, un module de déposition configuré pour déposer une couche sur le substrat flexible, un module de recuisson ayant un ou plusieurs éléments chauffants configurés pour la recuisson in-situ de la couche, et un module d'enroulement configuré pour enrouler le substrat avec la couche recuite.
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)