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1. (WO2013123742) EASY-TO-CLEAN CLAMPING DEVICE AND METHOD FOR THIN-WALLED DISK-SHAPED OBJECT

Pub. No.:    WO/2013/123742    International Application No.:    PCT/CN2012/076831
Publication Date: Fri Aug 30 01:59:59 CEST 2013 International Filing Date: Thu Jun 14 01:59:59 CEST 2012
IPC: H01L 21/683
H01L 21/68
H01L 21/67
Applicants: BEIJING SEVENSTAR ELECTRONICS CO., LTD.
北京七星华创电子股份有限公司
WU, Yi
吴仪
WANG, Hao
王浩
LI, Wei
李伟
WANG, Ruiting
王锐廷
ZHANG, Bao
张豹
Inventors: WU, Yi
吴仪
WANG, Hao
王浩
LI, Wei
李伟
WANG, Ruiting
王锐廷
ZHANG, Bao
张豹
Title: EASY-TO-CLEAN CLAMPING DEVICE AND METHOD FOR THIN-WALLED DISK-SHAPED OBJECT
Abstract:
An easy-to-clean clamping device and method for a thin-walled disk-shaped object. The device consists of a rotatable chuck body (3) and at least two sets of clamping components (1, 1') provided on the edge of the chuck body (3). The clamping component (1, 1') can swing with a connection point thereof to the chuck body (3) as a pivot, and a bottom end of the clamping component (1, 1') and the chuck body (3) are connected to a radial compression spring (5). During the cleaning, actions of clamping components in the same set are consistent, and the two sets of clamping components open and lock alternately. Clamping components in the same set are installed with magnets (7) having the same polarity to the outside, and clamping components in different sets are installed with magnets (7) having opposite polarities. Two sets of electromagnets (4', 4") are arranged on the chuck body (3) at uniform intervals. In the early cleaning stage, the two sets of electromagnets (4', 4") are not powered, and the two sets of clamping components are in a clamping state under the action of the compression spring (5), and during the cleaning, the clamping components (1, 1') are enabled to open alternately by changing the direction of a current in the electromagnets (4', 4"). The present invention can clean parts where the clamping components contact a thin-walled disk-shaped object, thereby improving the overall cleaning quality of the thin-walled disk-shaped object.