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1. (WO2013123039) ELECTRODES FORMED BY OXIDATIVE CHEMICAL VAPOR DEPOSITION AND RELATED METHODS AND DEVICES

Pub. No.:    WO/2013/123039    International Application No.:    PCT/US2013/025923
Publication Date: Fri Aug 23 01:59:59 CEST 2013 International Filing Date: Thu Feb 14 00:59:59 CET 2013
IPC: H01L 51/00
C23C 16/00
H01L 51/44
Applicants: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
Inventors: BARR, Miles, C.
HOWDEN, Rachel, M.
GLEASON, Karen, K.
BULOVIC, Vladimir
Title: ELECTRODES FORMED BY OXIDATIVE CHEMICAL VAPOR DEPOSITION AND RELATED METHODS AND DEVICES
Abstract:
The present invention generally relates to electrodes formed by oxidative chemical vapor deposition and related methods and devices.