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Pub. No.:    WO/2013/122109    International Application No.:    PCT/JP2013/053425
Publication Date: 22.08.2013 International Filing Date: 13.02.2013
B29C 59/02 (2006.01), H01L 21/027 (2006.01)
Applicants: SCIVAX CORPORATION [JP/JP]; #2007 NANOBIC, 7-7 Shinkawasaki, Saiwai-ku, Kawasaki-shi Kanagawa 2120032 (JP)
Inventors: KAWAGUCHI Hirosuke; (JP).
TANAKA Satoru; (JP)
Agent: OKUDA Noritsugu; 1-2354-430, Yurigaoka, Moriya-shi Ibaraki 3020110 (JP)
Priority Data:
2012-030014 14.02.2012 JP
(JA) インプリント装置およびインプリント方法
Abstract: front page image
(EN)An imprint device for transferring a pattern from a mold (1) to an article being molded (2). Said imprint device comprises the following: a stage (32) and a cover (33) for applying pressure to the mold (1) and the article being molded (2); a frame (43) that surrounds the stage (32) and has a hole into which the stage (32) can be inserted; a first moving means that can move the stage (32) and/or the cover (33) towards or away from each other; a second moving means (46) that can move the cover (33) and/or the frame (43) towards or away from each other; a first evacuating means (45) that evacuates an evacuation chamber (40) comprising the stage (32), the frame (43), and either the cover (33), the mold (1), or the article being molded (2) and removes a fluid from between the mold (1) and the article being molded (2); and a second evacuating means (35) that removes a fluid from a space formed between the cover (33) and either the mold (1) or the article being molded (2). This makes it possible to reduce the size and cost of this imprint device.
(FR)La présente invention concerne un dispositif d'impression permettant de transférer un motif depuis un moule (1) vers un article moulé (2). Ledit dispositif d'impression comprend les éléments suivants : une plaque support (32) et un couvercle (33) pour appliquer une pression sur le moule (1) et l'article moulé (2) ; un cadre (43) entourant la plaque support (32) et comportant un orifice dans lequel la plaque support (32) peut être insérée ; un premier élément mobile permettant de rapprocher ou d'éloigner l'un de l'autre la plaque support (32) et/ou le couvercle (33) ; un second élément mobile (46) permettant de rapprocher ou d'éloigner l'un de l'autre le couvercle (33) et/ou le cadre (43) ; un premier élément d'évacuation (45) permettant d'évacuer une chambre d'évacuation (40) comprenant la plaque support (32), le cadre (43) et le couvercle (33), le moule (1) ou l'article moulé (2) et de supprimer un fluide entre le moule (1) et l'article moulé (2) ; et un second élément d'évacuation (35) permettant de supprimer un fluide d'un espace formé entre le couvercle (33) et le moule (1) ou l'article moulé (2). Ce procédé permet de réduire la taille et le coût du dispositif d'impression.
(JA) 型1の成型パターンを被成形物2に転写するためのインプリント装置であって、型1と被成形物2を加圧するためのステージ32及びカバー33と、ステージ32を挿入可能な穴を有し、ステージ32の周囲を囲む枠体43と、ステージ32とカバー33を接離方向に相対的に移動可能な第1移動手段と、カバー33と枠体43とを接離方向に相対的に移動可能な第2移動手段46と、カバー33、型1又は被成形物2のいずれかと、ステージ32と、枠体43と、で構成される減圧室40を減圧し、型1と被成形物2の間の流体を除去する第1減圧手段45と、カバー33と型1又は被成形物2との間に形成される空間の流体を除去する第2減圧手段35と、で構成する。これにより、インプリント装置を小型化できると共に、コストを下げることができる。
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)