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1. (WO2013121827) HARD COATING FILM AND TARGET FOR FORMING HARD COATING FILM

Pub. No.:    WO/2013/121827    International Application No.:    PCT/JP2013/050813
Publication Date: Fri Aug 23 01:59:59 CEST 2013 International Filing Date: Fri Jan 18 00:59:59 CET 2013
IPC: C23C 14/06
C23C 14/32
C23C 14/34
Applicants: YUKEN INDUSTRY CO., LTD.
ユケン工業株式会社
Inventors: OOGUCHI Masayuki
大口 優幸
AOMATSU Akihiro
青松 明宏
Title: HARD COATING FILM AND TARGET FOR FORMING HARD COATING FILM
Abstract:
Provided are: a hard coating film having excellent thermal oxidation resistance; and a target for forming the hard coating film. The hard coating film provided has the following composition: (CraAlbTicNbd)(C1-e-fNeOf). In the formula, a represents the atomic ratio of Cr, b represents the atomic ratio of Al, c represents the atomic ratio of Ti, d represents the atomic ratio of Nb, e represents the atomic ratio of N, and f represents the atomic ratio of O, wherein a, b, c, d, e and f fulfill the following formulae: 0.01 < a < 0.40, 0.25 < b < 0.65, 0.0 < c, 0.0 < d, 0.20 < c+d < 0.65, a+b+c+d = 1.0, 0.0 ≤ e ≤ 1.0, 0.0 ≤ f ≤ 1.0, and 0.0 ≤ e+f ≤ 1.0.