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1. (WO2013121625) SUBSTRATE DELIVERY DEVICE, SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2013/121625    International Application No.:    PCT/JP2012/076765
Publication Date: 22.08.2013 International Filing Date: 17.10.2012
IPC:
G03F 7/20 (2006.01), B65H 23/24 (2006.01), G09F 9/00 (2006.01), H01L 21/027 (2006.01)
Applicants: NIKON CORPORATION [JP/JP]; 12-1, Yurakucho 1-chome, Chiyoda-ku, Tokyo 1008331 (JP)
Inventors: HORI Masakazu; (JP).
NISHIKAWA Jin; (JP)
Agent: SHIGA Masatake; 1-9-2, Marunouchi, Chiyoda-ku, Tokyo 1006620 (JP)
Priority Data:
2012-033164 17.02.2012 JP
2012-042777 29.02.2012 JP
Title (EN) SUBSTRATE DELIVERY DEVICE, SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
(FR) DISPOSITIF DE DISTRIBUTION DE SUBSTRAT, DISPOSITIF ET PROCÉDÉ DE TRAITEMENT DE SUBSTRAT
(JA) 基板搬送装置、基板処理装置、及び基板処理方法
Abstract: front page image
(EN)A substrate delivery device comprises a substrate supplying section for feeding a substrate in a certain direction, a substrate recovery section for winding the substrate fed from the substrate supplying section, a stage having a guiding surface for guiding the underside of the substrate, and a displacement mechanism for causing at least a part of the substrate guided on the guiding surface to be displaced in a direction orthogonal to the guiding surface.
(FR)La présente invention concerne un dispositif de distribution de substrat qui comprend une section de fourniture de substrat permettant d'alimenter un substrat dans une certaine direction, une section récupération de substrat permettant d'enrouler le substrat provenant de la section de fourniture de substrat, un étage possédant une surface de guidage pour guider le verso du substrat, et un mécanisme de déplacement pour amener au moins une partie du substrat guidé sur la surface de guidage à être déplacée dans une direction orthogonale vers la surface de guidage.
(JA) 基板搬送装置は、基板を所定方向に送り出す基板供給部と、前記前記基板供給部から送り出された基板を巻き取る基板回収部と、基板の裏面を案内する案内面を有するステージと、案内面に案内される基板の少なくとも一部を案内面に交差する方向に変位させる変位機構と、を備える。
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)