Some content of this application is unavailable at the moment.
If this situation persist, please contact us atFeedback&Contact
1. (WO2013120809) PROCESS ROLLER FOR RECEIVING AND GUIDING SUBSTRATES IN STRIP FORM IN VACUUM COATING INSTALLATIONS
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2013/120809 International Application No.: PCT/EP2013/052697
Publication Date: 22.08.2013 International Filing Date: 11.02.2013
IPC:
C23C 14/56 (2006.01) ,C23C 14/54 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
56
Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
54
Controlling or regulating the coating process
Applicants:
FHR ANLAGENBAU GMBH [DE/DE]; Am Hügel 2 01458 Ottendorf-Okrilla, DE
Inventors:
KÖHLER, Lutz; DE
MICHEL, Daniel; DE
NOBEL, Anthony; DE
GRAFE, Marco; DE
Agent:
LIPPERT, STACHOW & PARTNER; Krenkelstrasse 3 01309 Dresden, DE
Priority Data:
10 2012 202 086.113.02.2012DE
Title (EN) PROCESS ROLLER FOR RECEIVING AND GUIDING SUBSTRATES IN STRIP FORM IN VACUUM COATING INSTALLATIONS
(FR) ROULEAU DE TRAITEMENT POUR LA RÉCEPTION ET LE GUIDAGE DE SUBSTRATS SOUS FORME DE BANDE DANS DES INSTALLATIONS D'APPLICATION DE REVÊTEMENT SOUS VIDE
Abstract:
(EN) The invention relates to a process roller for receiving and guiding substrates in strip form in vacuum coating installations comprising a heater located inside the process roller, in the form of an elongated radiant heater, and also a cylindrical lateral surface for receiving a substrate in strip form, the process roller being mounted rotatably about an axis of rotation in a vacuum process chamber. The invention is intended to provide a process roller wherein a particularly uniform temperature distribution can be achieved on the lateral surface thereof by simple means. The object is achieved by the process roller (2) being configured in a vacuum- tight manner, by the lateral surface (3) of the process roller (2) being connected in a vacuum-tight manner to two end caps (4, 5), which have a flattened, outwardly curved hemispherical form, the interior space of the process roller (2) being connected to a vacuum connection (6), and by the radiant heater (8) extending into the region of the end caps (4, 5).
(FR) L'invention porte sur un rouleau de traitement pour la réception et le guidage de substrats sous forme de bande dans des installations d'application de revêtement sous vide, comprenant un dispositif de chauffage situé à l'intérieur du rouleau de traitement, sous la forme d'un dispositif de chauffage par rayonnement allongé, et également une surface latérale cylindrique pour la réception d'un substrat sous forme de bande, le rouleau de traitement étant monté de façon à pouvoir tourner autour d'un axe de rotation dans une chambre de traitement sous vide. Dans le rouleau de traitement selon l'invention, une distribution de température particulièrement homogène peut être réalisée sur sa surface latérale par un moyen simple. A cet effet, le rouleau de traitement (2) est conçu d'une manière étanche au vide, la surface latérale (3) du rouleau de traitement (2) est raccordée d'une manière étanche au vide à deux calottes (4, 5), qui ont une forme hémisphérique incurvée vers l'extérieur aplatie, l'espace intérieur du rouleau de traitement (2) est raccordé à un raccord pour vide (6) et le dispositif de chauffage par rayonnement (8) s'étend dans la zone entre les calottes (4, 5).
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)