Search International and National Patent Collections

1. (WO2013119902) LIQUID PHASE SYNTHESIS OF TRISILYLAMINE

Pub. No.:    WO/2013/119902    International Application No.:    PCT/US2013/025272
Publication Date: Fri Aug 16 01:59:59 CEST 2013 International Filing Date: Sat Feb 09 00:59:59 CET 2013
IPC: C01B 21/068
B01J 19/18
Applicants: L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE
KOROLEV, Andrey, V.
Inventors: KOROLEV, Andrey, V.
Title: LIQUID PHASE SYNTHESIS OF TRISILYLAMINE
Abstract:
A method of producing trisilylamine (TSA) is presented, the method comprising: a. adding a monohalosilane to a reactor containing an anhydrous solvent to form a solution at a temperature ranging from approximately -100 °C to approximately 0 °C; b. adding anhydrous ammonia to the solution formed in la to produce a mixture; c. stirring the mixture of lb to form a stirred mixture; and d. isolating TSA from the stirred mixture obtained in 1c by distillation.