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1. (WO2013119737) PROCESSING FLEXIBLE GLASS WITH A CARRIER

Pub. No.:    WO/2013/119737    International Application No.:    PCT/US2013/025035
Publication Date: Fri Aug 16 01:59:59 CEST 2013 International Filing Date: Fri Feb 08 00:59:59 CET 2013
IPC: H01L 21/50
Applicants: CORNING INCORPORATED
Inventors: ABRAMOV, Anatoli Anatolyevich
BELLMAN, Robert Alan
BOOKBINDER, Dana Craig
CHUANG, Ta-Ko
DOMEY, Jeffrey John
ENICKS, Darwin Gene
GASKILL, Linda
KANG, Kiat Chyai
KEMMERER, Marvin William
KUO, Kuan-Ting
LIN, Jen-Chieh
MANLEY, Robert George
THOMAS, John Christopher
TSENG, Pei-Lien
ZHANG, Jian-Zhi Jay
Title: PROCESSING FLEXIBLE GLASS WITH A CARRIER
Abstract:
A method of removing a desired part of a thin sheet (20) from a thin sheet bonded to a carrier (10) by a bonded area (40) that surrounds a non-bonded area (50), wherein the method includes forming a perimeter vent (60) defining a perimeter of the desired part (56), wherein the perimeter vent is disposed within the non-bonded area and has a depth ≥ 50% of the thickness (22) of the thin sheet. Prior to removing the desired part, a device may be processed onto the thin sheet. In some processes, the carrier is diced so it may be processed in smaller sizes, yet maintains a hermetically sealed edge. After dicing, an additional part of the device may be processed onto the thin sheet, and the desired part is removed by removing a desired part of the thin sheet from the carrier.