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1. (WO2013119313) MICROPLASMA GENERATOR WITH ARRAY OF TAPERED MICROSTRIPS

Pub. No.:    WO/2013/119313    International Application No.:    PCT/US2012/068427
Publication Date: Fri Aug 16 01:59:59 CEST 2013 International Filing Date: Sat Dec 08 00:59:59 CET 2012
IPC: H01L 31/042
Applicants: TRUSTEES OF TUFTS COLLEGE
Inventors: MIURA, Naoto
Title: MICROPLASMA GENERATOR WITH ARRAY OF TAPERED MICROSTRIPS
Abstract:
A plasma generator ignites and sustains a uniform and linear plasma near atmospheric pressure. The plasma generator is composed of two power supplies, a power divider, an array of transmission line tapers and an ignition resonator. One microwave power supply is used to drive the taper array and the other power supply drives the ignition resonator. The power divider splits the taper array power evenly and delivers it to each taper. A plasma is ignited by the ignition resonator and then the plasma propagates to the taper array. The taper array does not start a plasma by itself and the ignition resonator is provided to do so. Increasing the number of tapers increases the length of the plasma.