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1. (WO2013118694) METHOD FOR MANUFACTURING LAMINATED BODY
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2013/118694    International Application No.:    PCT/JP2013/052536
Publication Date: 15.08.2013 International Filing Date: 05.02.2013
IPC:
H01L 21/02 (2006.01)
Applicants: TOKYO OHKA KOGYO CO., LTD. [JP/JP]; 150, Nakamaruko, Nakahara-ku, Kawasaki-shi, Kanagawa 2110012 (JP)
Inventors: MATSUSHITA, Atsushi; (JP).
MITAKE, Tatsuhiro; (JP)
Agent: HARAKENZO WORLD PATENT & TRADEMARK; Daiwa Minamimorimachi Building, 2-6, Tenjinbashi 2-chome Kita, Kita-ku, Osaka-shi, Osaka 5300041 (JP)
Priority Data:
2012-025379 08.02.2012 JP
Title (EN) METHOD FOR MANUFACTURING LAMINATED BODY
(FR) PROCÉDÉ DE FABRICATION DE CORPS STRATIFIÉ
(JA) 積層体の製造方法
Abstract: front page image
(EN)A method for manufacturing a laminated body including a substrate, a support body, and a separating layer, the method including a preliminary treatment process for increasing the temperature of the support body transported into a reaction chamber and the temperature in the reaction chamber via plasma treatment, and a separating layer forming process for supplying a source gas for forming the separating layer into the reaction chamber after the preliminary treatment process and forming the separating layer on the support body.
(FR)L'invention concerne un procédé de fabrication d'un corps stratifié comprenant un substrat, un corps de support et une couche de séparation, le procédé comprenant un processus de traitement préliminaire pour augmenter la température du corps de support transporté dans une enceinte de réaction et la température dans l'enceinte de réaction par traitement plasma, et un processus de formation de la couche de séparation pour fournir un gaz source destiné à former la couche de séparation dans l'enceinte de réaction après le processus de traitement préliminaire et à former la couche de séparation sur le corps de support.
(JA)基板、支持体および分離層を備えた積層体の製造方法であって、反応室内に搬入された支持体および反応室内の温度をプラズマ処理により上昇させる予備処理工程と、予備処理工程の後、分離層となる原料ガスを反応室内に供給し、支持体上に分離層を形成する分離層形成工程と、を包含している、製造方法。
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)