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1. (WO2013118546) IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE

Pub. No.:    WO/2013/118546    International Application No.:    PCT/JP2013/050702
Publication Date: Fri Aug 16 01:59:59 CEST 2013 International Filing Date: Thu Jan 10 00:59:59 CET 2013
IPC: H01L 21/027
B29C 59/02
B81C 99/00
G11B 5/84
G11B 7/26
Applicants: CANON KABUSHIKI KAISHA
Inventors: ARAI, Tsuyoshi
Title: IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
Abstract:
The present invention provides an imprint apparatus which performs an imprint process of transferring a pattern onto a substrate, the apparatus comprising a deforming unit configured to deform the pattern surface by applying a force to the mold, an obtaining unit configured to obtain thickness information of the mold, a calculation unit configured to calculate a force to be applied to the mold based on the thickness information of the mold obtained by the obtaining unit, so that the pattern surface has a target shape in the imprint process, and a control unit configured to control the deforming unit to apply the force calculated by the calculation unit to the mold in the imprint process.