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1. (WO2013118386) X-RAY INSPECTION DEVICE, INSPECTION METHOD, AND X-RAY DETECTOR

Pub. No.:    WO/2013/118386    International Application No.:    PCT/JP2012/082126
Publication Date: Fri Aug 16 01:59:59 CEST 2013 International Filing Date: Thu Dec 13 00:59:59 CET 2012
IPC: G01N 23/04
G01T 1/24
Applicants: HITACHI HIGH-TECHNOLOGIES CORPORATION
株式会社日立ハイテクノロジーズ
Inventors: URANO, Yuta
浦野 雄太
HONDA, Toshifumi
本田 敏文
AOKI, Yasuko
青木 康子
Title: X-RAY INSPECTION DEVICE, INSPECTION METHOD, AND X-RAY DETECTOR
Abstract:
The X-ray inspection device includes: an X-ray source with a focal spot size greater than the diameter of a defect for irradiating a sample with X-rays; an X-ray TDI detector arranged near the sample and having long pixels in a direction parallel to the scanning direction of the sample for detecting the X-rays emitted by the X-ray source and passing through the sample as an X-ray transmission image; and a defect-detecting unit for detecting defects based on the X-ray transmission image detected by the X-ray TDI detector.