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1. (WO2013116335) METHOD AND APPARATUS FOR PRODUCING A TRANSPARENT CONDUCTIVE OXIDE
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2013/116335    International Application No.:    PCT/US2013/023843
Publication Date: 08.08.2013 International Filing Date: 30.01.2013
IPC:
C23C 14/08 (2006.01), C23C 14/54 (2006.01), C23C 14/56 (2006.01), C23C 14/02 (2006.01), H01L 31/18 (2006.01)
Applicants: FIRST SOLAR, INC [US/US]; 28101 Cedar Park Boulevard Perrysburg, OH 43551 (US)
Inventors: ZHAO, Zhibo; (US).
SHAO, Rui; (US).
HWANG, David; (US).
BULLER, Benyamin; (US).
ROBERTS, Dale; (US)
Agent: D'AMICO, Thomas J.; Dickstein Shapiro LLP 1825 Eye Street, NW Washington, DC 20006-5403 (US)
Priority Data:
61/592,339 30.01.2012 US
Title (EN) METHOD AND APPARATUS FOR PRODUCING A TRANSPARENT CONDUCTIVE OXIDE
(FR) PROCÉDÉ ET APPAREIL DE PRODUCTION D'UN OXYDE CONDUCTEUR TRANSPARENT
Abstract: front page image
(EN)A method and apparatus for manufacturing a multi-layered structure includes forming a crystalline layer of a material by depositing an amorphous layer of the material on a heated substrate.
(FR)La présente invention concerne un procédé et un appareil de fabrication d'une structure multicouche. Le procédé consiste à former une couche cristalline d'un matériau en déposant une couche amorphe du matériau sur un substrat chauffé.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)