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1. (WO2013116215) INTEGRATED VAPOR TRANSPORT DEPOSITION METHOD AND SYSTEM
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2013/116215 International Application No.: PCT/US2013/023624
Publication Date: 08.08.2013 International Filing Date: 29.01.2013
IPC:
C23C 14/02 (2006.01) ,C23C 14/06 (2006.01) ,C23C 14/22 (2006.01) ,C23C 14/58 (2006.01) ,H01L 21/365 (2006.01) ,H01L 31/032 (2006.01)
Applicants: FIRST SOLAR, INC.[US/US]; 28101 Cedar Park Boulevard Perrysburg, OH 43551, US
Inventors: XIONG, Gang; US
BARDEN, John; US
LIAO, Feng; US
POWELL, Rick, C.; US
JIN, Changming; US
Agent: D'AMICO, Thomas, J.; Dickstein Shapiro LLP 1825 Eye Street, Nw Washington, DC 20006-5403, US
Priority Data:
61/592,98531.01.2012US
Title (EN) INTEGRATED VAPOR TRANSPORT DEPOSITION METHOD AND SYSTEM
(FR) PROCÉDÉ ET SYSTÈME INTÉGRÉS DE DÉPÔT PAR TRANSPORT DE VAPEUR
Abstract: front page image
(EN) A vapor transport deposition system and method that includes a vaporizer and distributor unit ant at least one auxiliary process unit for integrating thin-film layer deposition with one or more pre-or post-deposition processes.
(FR) L'invention concerne un système et un procédé de dépôt par transport de vapeur, incluant une unité de vaporiseur et de distributeur et au moins une unité de procédé auxiliaire, en vue de l'intégration d'un dépôt de couche en film mince à un ou plusieurs procédés avant ou après le dépôt.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)