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1. (WO2013114917) MEMS DEVICE AND ELECTRONIC INSTRUMENT HAVING PROJECTOR FUNCTION

Pub. No.:    WO/2013/114917    International Application No.:    PCT/JP2013/050133
Publication Date: Fri Aug 09 01:59:59 CEST 2013 International Filing Date: Wed Jan 09 00:59:59 CET 2013
IPC: G02B 26/10
B81B 3/00
Applicants: FUNAI ELECTRIC CO., LTD.
船井電機株式会社
Inventors: MURAYAMA, Manabu
村山 学
KUGO, Kouichi
久後 耕一
INOUE, Naoki
井上 尚樹
FUJII, Hitoshi
藤井 仁
Title: MEMS DEVICE AND ELECTRONIC INSTRUMENT HAVING PROJECTOR FUNCTION
Abstract:
In this MEMS device (1), first drive units (40) are divided into first drive portions (41) and second drive portions (42). Second drive units (50) are divided into third drive portions (51) and fourth drive portions (52). The first drive portions, the second drive portions, the third drive portions, and the fourth drive portions are driven and controlled independently of each other, and an optical component (10) is thereby tilted.