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|1. (WO2013114917) MEMS DEVICE AND ELECTRONIC INSTRUMENT HAVING PROJECTOR FUNCTION|
|Applicants:||FUNAI ELECTRIC CO., LTD.
|Title:||MEMS DEVICE AND ELECTRONIC INSTRUMENT HAVING PROJECTOR FUNCTION|
In this MEMS device (1), first drive units (40) are divided into first drive portions (41) and second drive portions (42). Second drive units (50) are divided into third drive portions (51) and fourth drive portions (52). The first drive portions, the second drive portions, the third drive portions, and the fourth drive portions are driven and controlled independently of each other, and an optical component (10) is thereby tilted.