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1. (WO2013114464) ELECTRON BEAM INTERFERENCE DEVICE AND ELECTRON BEAM INTERFERENCE METHOD

Pub. No.:    WO/2013/114464    International Application No.:    PCT/JP2012/000724
Publication Date: Fri Aug 09 01:59:59 CEST 2013 International Filing Date: Sat Feb 04 00:59:59 CET 2012
IPC: H01J 37/295
H01J 37/22
Applicants: HITACHI, LTD.
株式会社日立製作所
HARADA, Ken
原田 研
KASAI, Hiroto
葛西 裕人
Inventors: HARADA, Ken
原田 研
KASAI, Hiroto
葛西 裕人
Title: ELECTRON BEAM INTERFERENCE DEVICE AND ELECTRON BEAM INTERFERENCE METHOD
Abstract:
The range and distance for which the interference of an electron beam is possible are limited, and electron beam interference is only realized within the range of this coherence length. Therefore, in the present invention, giving attention to the fact that a phase distribution reproduced and observed through interference microscopy is the difference in phase distributions of two waves used for interference, a difference image of phase distributions between a predetermined observation region and a predetermined reference wave is obtained by continuously recording an interference image for each interference region width from the interference image between the reference wave and the observation region adjacent to the reference wave and deriving an integral of the phase distributions obtained by individually reproducing the interference images. By implementing this operation on each phase distribution and arranging the obtained phase distribution patterns in a predetermined order, an interference image over a wide range that exceeds the coherence length can be obtained.