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1. (WO2013114099) PROBE ACTUATION
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2013/114099 International Application No.: PCT/GB2013/050194
Publication Date: 08.08.2013 International Filing Date: 29.01.2013
IPC:
G01Q 10/04 (2010.01) ,G01Q 20/02 (2010.01) ,B82Y 35/00 (2011.01)
G PHYSICS
01
MEASURING; TESTING
Q
SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY [SPM]
10
Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
04
Fine scanning or positioning
G PHYSICS
01
MEASURING; TESTING
Q
SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY [SPM]
20
Monitoring the movement or position of the probe
02
by optical means
B PERFORMING OPERATIONS; TRANSPORTING
82
NANO-TECHNOLOGY
Y
SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; MEASUREMENT OR ANALYSIS OF NANO-STRUCTURES; MANUFACTURE  OR TREATMENT OF NANO-STRUCTURES
35
Methods or apparatus for measurement or analysis of nano-structures
Applicants:
INFINITESIMA LIMITED [GB/GB]; Oxford Centre for Innovation New Road Oxford Oxfordshire OX1 1BY, GB
Inventors:
HUMPHRIS, Andrew; GB
ZHAO, Bin; GB
Agent:
RIBEIRO, James; Withers & Rogers LLP 4 More London Riverside London SE1 2AU, GB
Priority Data:
1201640.831.01.2012GB
Title (EN) PROBE ACTUATION
(FR) COMMANDE D'UNE SONDE
Abstract:
(EN) A method of driving a probe of a scanning probe microscope. The intensities of first and second radiation beams are modulated; and the beams are directed simultaneously onto the probe whereby each beam heats the probe and causes the probe to deform, typically by the photothermal effect. The optical system is arranged to direct the centres of the beams onto different locations on the probe. This enables the location of each beam to be chosen to optimise its effect. A lens receives the first and second beams and focuses them onto the probe. A beam combiner is arranged to receive and combine the beams and direct the combined beams towards the probe.
(FR) L'invention concerne un procédé de commande d'une sonde d'un microscope à sonde de balayage. L'intensité d'un premier et d'un second faisceau de rayonnement est modulé; et les faisceaux sont dirigés simultanément sur la sonde de sorte que chaque faisceau chauffe la sonde et l'amène à se déformer, généralement par l'effet photothermique. Le système optique est agencé de façon à diriger les centres des faisceaux sur différents emplacements extérieurs de la sonde. Ceci permet de choisir l'emplacement de chaque faisceau afin d'en optimiser l'effet. Une lentille reçoit le premier et le second faisceau et les focalise sur la sonde. Un combineur de faisceaux est agencé de façon à recevoir et combiner les faisceaux, puis à diriger les faisceaux combinés vers la sonde.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)