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1. (WO2013112659) METHOD AND APPARATUS SEPARATE MODULES FOR PROCESSING A SUBSTRATE
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2013/112659    International Application No.:    PCT/US2013/022850
Publication Date: 01.08.2013 International Filing Date: 24.01.2013
IPC:
H01L 21/67 (2006.01)
Applicants: FIRST SOLAR, INC. [US/US]; 28101 Cedar Park Boulevard Perrysburg, OH 43551 (US)
Inventors: LIM, Chong; (US).
KARPENKO, Oleh, P.; (US).
GUPTA, Akhlesh; (US)
Agent: D'AMICO, Thomas J.; Dickstein Shapiro LLP 1825 Eye Street, Nw Washington, DC 20006-5403 (US)
Priority Data:
61/590,616 25.01.2012 US
Title (EN) METHOD AND APPARATUS SEPARATE MODULES FOR PROCESSING A SUBSTRATE
(FR) PROCÉDÉ ET APPAREIL DE MODULES SÉPARÉS POUR LE TRAITEMENT D'UN SUBSTRAT
Abstract: front page image
(EN)A method and apparatus for heat treating a photovoltaic device. The apparatus includes a heating module, a processing module, and a cooling module in which the operating temperatures of the modules may be controlled separately. The heating module is configured to pre-heat a substrate and stabilize the substrate at the desired target temperature, the processing module is configured to thermally process the substrate, and the cooling module is configured for post-treatment cooling of the substrate.
(FR)Procédé et appareil de traitement thermique d'un dispositif photovoltaïque. L'appareil comprend un module de chauffage, un module de traitement, et un module de refroidissement dans lesquels les températures de fonctionnement des modules peuvent être contrôlées séparément. Le module de chauffage est configuré pour préchauffer un substrat et le stabiliser à la température cible souhaitée, le module de traitement est configuré pour traiter thermiquement le substrat, et le module de refroidissement est configuré pour le refroidissement post-traitement du substrat.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)