Search International and National Patent Collections

1. (WO2013112301) METHODS AND APPARATUS FOR SENSING A SUBSTRATE IN A LOAD CUP

Pub. No.:    WO/2013/112301    International Application No.:    PCT/US2013/021184
Publication Date: Fri Aug 02 01:59:59 CEST 2013 International Filing Date: Sat Jan 12 00:59:59 CET 2013
IPC: B24B 37/04
B24B 37/34
H01L 21/683
Applicants: APPLIED MATERIALS, INC
Inventors: LISCHKA, David J.
ATKINSON, Jim K.
DOMIN, Jonathan Paul
LIU, Andrew
Title: METHODS AND APPARATUS FOR SENSING A SUBSTRATE IN A LOAD CUP
Abstract:
Methods, apparatus, and systems are provided for detecting the presence of a substrate in a load cup. The invention includes a proximity sensor having a detection pad disposed below a contact surface of a load cup assembly and a target disposed on a lever member and adapted to move toward the detection pad when a substrate is placed on the lever member and adapted to move away from the detection pad when a substrate is removed from the lever member. Numerous additional aspects are disclosed.