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1. (WO2013111452) OXIDATION PREVENTING GAS SPRAY UNIT
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2013/111452 International Application No.: PCT/JP2012/081135
Publication Date: 01.08.2013 International Filing Date: 30.11.2012
IPC:
H01L 21/60 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02
Manufacture or treatment of semiconductor devices or of parts thereof
04
the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer
50
Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/06-H01L21/326162
60
Attaching leads or other conductive members, to be used for carrying current to or from the device in operation
Applicants:
株式会社新川 SHINKAWA LTD. [JP/JP]; 東京都武蔵村山市伊奈平2丁目51番地の1 2-51-1, Inadaira, Musashimurayama-shi, Tokyo 2088585, JP
Inventors:
前田 徹 MAEDA, Toru; JP
坂倉 光昭 SAKAKURA, Mitsuaki; JP
Agent:
特許業務法人YKI国際特許事務所 YKI PATENT ATTORNEYS; 東京都武蔵野市吉祥寺本町一丁目34番12号 1-34-12, Kichijoji-Honcho, Musashino-shi, Tokyo 1800004, JP
Priority Data:
2012-01423626.01.2012JP
Title (EN) OXIDATION PREVENTING GAS SPRAY UNIT
(FR) UNITÉ DE PROJECTION DE GAZ EMPÊCHANT L'OXYDATION
(JA) 酸化防止ガス吹き出しユニット
Abstract:
(EN) This oxidation preventing gas spray unit is provided with: a base part (10) with a hollow plate shape inside which oxidation preventing gas flow paths (53, 54) are formed; an oxidation preventing gas inlet (20) that allows oxidation preventing gas to flow into the oxidation preventing gas flow paths (53, 54); a through hole (30) that passes through the base part (10) in the direction of thickness such that a capillary (72) is inserted and removed, linked to the oxidation preventing gas flow paths (53, 54), and in which the oxidation preventing gas flows; and a film heater (40) that is attached to the outer surface of the base part (10) around the through hole (30). The structure is compact and free air balls can be heated efficiently.
(FR) Cette invention concerne une unité de projection de gaz empêchant l'oxydation, comprenant : une partie de base (10) formant plaque creuse, à l'intérieur de laquelle sont formés des passages d'écoulement (53, 54) de gaz empêchant l'oxydation ; un orifice d'entrée (20) de gaz empêchant l'oxydation qui permet à un gaz empêchant l'oxydation de s'écouler dans les passages d'écoulement (53, 54) de gaz empêchant l'oxydation ; un orifice traversant (30) qui traverse la partie de base (10) dans le sens de l'épaisseur de telle façon qu'un capillaire (72) puisse être inséré et retiré, relié aux passages d'écoulement de gaz empêchant l'oxydation (53, 54), et dans lequel s'écoule le gaz empêchant l'oxydation ; et un film chauffant (40) qui est fixé à la surface extérieure de la partie de base (10) autour de l'orifice traversant (30). La structure selon l'invention est compacte et elle permet de chauffer efficacement des bulles d'air libre.
(JA)  酸化防止ガス吹き出しユニットは、内部に酸化防止ガス流路(53),(54)が形成された中空板状の基体部(10)と、酸化防止ガス流路(53),(54)に酸化防止ガスを流入させる酸化防止ガス入り口(20)と、キャピラリ(72)が抜き差しされるように基体部(10)の厚さ方向に貫通し、酸化防止ガス流路(53),(54)に連通して酸化防止ガスが流出する貫通穴(30)と、貫通穴(30)の周りの基体部(10)の外面に取り付けられるフィルムヒータ(40)とを備え、コンパクトな構造で効果的にフリーエアボールを加温することができる。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)