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1. WO2013059453 - TEMPERATURE CONTROL SYSTEM AND METHOD FOR A CHAMBER OR PLATFORM

Publication Number WO/2013/059453
Publication Date 25.04.2013
International Application No. PCT/US2012/060806
International Filing Date 18.10.2012
IPC
G05D 23/19 2006.1
GPHYSICS
05CONTROLLING; REGULATING
DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
23Control of temperature
19characterised by the use of electric means
G01R 31/28 2006.1
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
31Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
28Testing of electronic circuits, e.g. by signal tracer
H01L 21/67 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
CPC
G01R 31/2877
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
31Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
28Testing of electronic circuits, e.g. by signal tracer
2851Testing of integrated circuits [IC]
2855Environmental, reliability or burn-in testing
2872related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
2874related to temperature
2877related to cooling
G05D 23/19
GPHYSICS
05CONTROLLING; REGULATING
DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
23Control of temperature
19characterised by the use of electric means
Applicants
  • TEMPTRONIC CORPORATION [US]/[US]
Inventors
  • WENG, Chuan
Agents
  • MILLS, Steven M.
Priority Data
13/275,97618.10.2011US
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) TEMPERATURE CONTROL SYSTEM AND METHOD FOR A CHAMBER OR PLATFORM
(FR) SYSTÈME ET PROCÉDÉ DE RÉGULATION DE TEMPÉRATURE POUR UNE CHAMBRE OU UNE PLATEFORME
Abstract
(EN) A temperature control system and method include a source of a temperature control medium that is to be introduced into a space. A fluid line conveys the temperature control medium from the source to the space, a first end of the fluid line being disposed in the space. An orifice assembly has an orifice through which the cooling medium flows toward the space. A size of the orifice is adjustable such that a rate of flow of the cooling medium entering the space is controllable. The size of the orifice may be adjusted by an actuating device comprising a motor coupled to a lead screw moving a plug, or the system may comprise a plurality of interchangeable orifice elements having respective orifices of different sizes.
(FR) La présente invention concerne un système et un procédé de régulation de température qui comprennent une source d'un milieu de régulation de température qui doit être introduit dans un espace. Une ligne de fluide transporte le milieu de régulation de température depuis la source vers l'espace, une première extrémité de la ligne de fluide étant disposée dans l'espace. Un ensemble orifice possède un orifice à travers lequel le milieu de refroidissement s'écoule vers l'espace. Une dimension de l'orifice est réglable de sorte d'un débit du milieu de refroidissement entrant dans l'espace puisse être régulé. La dimension de l'orifice peut être réglée par un dispositif d'actionnement comprenant un moteur accouplé à une vis mère déplaçant un bouchon, ou bien le système peut comprendre une pluralité d'éléments d'orifice interchangeables possédant des orifices respectifs de différentes dimensions.
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