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Machine translation
1. (WO2013058449) ELECTRODE FOR A DEPOSITION PROCESS, AND METHOD FOR MANUFACTURING SAME
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2013/058449    International Application No.:    PCT/KR2012/002237
Publication Date: 25.04.2013 International Filing Date: 28.03.2012
IPC:
H01L 31/18 (2006.01), H01L 31/042 (2006.01)
Applicants: DAE SAN MATERIALS CO., LTD. [KR/KR]; 710, 233 Gasan digital 1-ro Geumcheon-gu Seoul 153-803 (KR) (For All Designated States Except US).
KIM, Jae Bum [KR/KR]; (KR) (For US Only)
Inventors: KIM, Jae Bum; (KR)
Agent: YOU ME PATENT AND LAW FIRM; Seolim Bldg. 649-10, Yoksam-dong Kangnam-ku Seoul 135-080 (KR)
Priority Data:
10-2011-0107152 19.10.2011 KR
Title (EN) ELECTRODE FOR A DEPOSITION PROCESS, AND METHOD FOR MANUFACTURING SAME
(FR) ÉLECTRODE POUR PROCESSUS DE DÉPÔT ET PROCÉDÉ POUR SA FABRICATION
(KO) 증착 공정용 전극 및 그 제조 방법
Abstract: front page image
(EN)The present invention relates to an electrode for a deposition process, which comprises a body portion installed on the bottom of the electrode and connected to external power, and a head portion integrally formed on the top of the body portion and coupled to an object to be subjected to deposition, wherein the body portion and the head portion are formed together in a forging process. The present invention also relates to a method for manufacturing the electrode. According to the present invention, manufacturing costs can be significantly reduced, and electrical conductivity and heat resistance can be improved.
(FR)La présente invention concerne une électrode pour processus de dépôt, qui comporte une partie de corps installée sur le bas de l'électrodes et reliée à une alimentation extérieure, et une partie de tête formée de façon intégrée par-dessus la partie de corps et couplée à un objet destiné à être soumis à un dépôt, la partie de corps et la partie de tête étant formées ensemble lors d'un processus de forgeage. La présente invention concerne également un procédé de fabrication de l'électrode. Selon la présente invention, les coûts de fabrication peuvent être significativement réduits tout en améliorant la conductivité électrique et la résistance à la chaleur.
(KO)본 발명은 전극의 하부에 설치되며 외부 전력과 연결되는 바디부와 상기 바디부 상부에 일체로 형성되며 피증착물과 결합되는 헤드부를 포함하고, 상기 바디부 및 상기 헤드부는 단조 가공으로 함께 형성되는 것을 특징으로 하는 증착 공정용 전극 및 그 제조방법에 관한 것으로서, 본 발명에 의하면 제조단가를 현저하게 낮출 수 있고, 전기전도율과 내열성을 향상시킬 수 있다.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Korean (KO)
Filing Language: Korean (KO)