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1. WO2013058004 - WASTE WORKING FLUID RECIRCULATION APPARATUS

Publication Number WO/2013/058004
Publication Date 25.04.2013
International Application No. PCT/JP2012/069805
International Filing Date 03.08.2012
IPC
B23Q 11/10 2006.1
BPERFORMING OPERATIONS; TRANSPORTING
23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL, CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
11Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
10Arrangements for cooling or lubricating tools or work
H01L 21/301 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02Manufacture or treatment of semiconductor devices or of parts thereof
04the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer
18the devices having semiconductor bodies comprising elements of group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20-H01L21/26142
301to subdivide a semiconductor body into separate parts, e.g. making partitions
CPC
B24B 57/04
BPERFORMING OPERATIONS; TRANSPORTING
24GRINDING; POLISHING
BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
57Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
04for feeding of solid grinding, polishing or lapping agents
B28D 5/007
BPERFORMING OPERATIONS; TRANSPORTING
28WORKING CEMENT, CLAY, OR STONE
DWORKING STONE OR STONE-LIKE MATERIALS
5Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
007Use, recovery or regeneration of abrasive mediums
H01L 21/67017
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
67005Apparatus not specifically provided for elsewhere
67011Apparatus for manufacture or treatment
67017Apparatus for fluid treatment
Y02P 70/10
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
70Climate change mitigation technologies in the production process for final industrial or consumer products
10Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Applicants
  • 株式会社村田製作所 Murata Manufacturing Co.,Ltd. [JP]/[JP] (AllExceptUS)
  • 吉田 努 YOSHIDA Tsutomu [JP]/[JP] (UsOnly)
Inventors
  • 吉田 努 YOSHIDA Tsutomu
Agents
  • 福永 正也 FUKUNAGA Masaya
Priority Data
2011-23084520.10.2011JP
Publication Language Japanese (ja)
Filing Language Japanese (JA)
Designated States
Title
(EN) WASTE WORKING FLUID RECIRCULATION APPARATUS
(FR) APPAREIL DE REMISE EN CIRCULATION DE FLUIDE ACTIF USAGÉ
(JA) 加工廃液循環装置
Abstract
(EN) Provided is a waste working fluid recirculation apparatus that is capable of circulating working fluid without supplying the working fluid to a processing apparatus, and capable of making the quality and temperature of working fluid more uniform. Working fluid is supplied to a dicing device (1), and then the used working fluid is recycled and resupplied to the dicing device (1). The waste working fluid recirculation apparatus is provided with: a supply tank (15) for storing recycled working fluid; a supply pump (12) for resupplying the recycled working fluid to the dicing device (1); a supply channel (11) for supplying the working fluid to a processing apparatus; and a return pipe (41) for returning the working fluid to the supply tank (15) from partway along the supply channel (11). Inverter control makes it possible to adjust the amount of working fluid supplied by the supply pump (12). When the amount of working fluid supplied is less than a prescribed amount, working fluid is guided to the supply tank (15) through the return pipe (41).
(FR) L'invention concerne un appareil de remise en circulation de fluide actif usagé permettant de remettre en circulation le fluide actif sans fournir le fluide actif à un appareil de traitement et permettant d'uniformiser la qualité et la température du fluide actif. Le fluide actif est fourni à un dispositif de découpage en dés (1), puis le fluide actif utilisé est recyclé et est de nouveau fourni au dispositif de découpage en dés (1). L'appareil de remise en circulation de fluide actif usagé comprend : un réservoir d'alimentation (15) permettant de stocker le fluide actif recyclé ; une pompe d'alimentation (12) permettant de fournir de nouveau le fluide actif recyclé au dispositif de découpage en dés (1) ; un canal d'alimentation (11) permettant de fournir le fluide actif à un appareil de traitement ; et une conduite de retour (41) permettant de retourner le fluide actif vers le réservoir d'alimentation (15) depuis une position située à mi-chemin le long du canal d'alimentation (11). Une commande d'inverseur permet d'ajuster la quantité de fluide actif fournie par la pompe d'alimentation (12). Lorsque la quantité de fluide actif fournie est inférieure à une quantité prédéterminée, le fluide actif est guidé vers le réservoir d'alimentation (15) par le biais de la conduite de retour (41).
(JA) 加工液を加工装置へ供給することなく循環させることができ、加工液の品質及び温度の均質化を図ることができる加工廃液循環装置を提供する。ダイシング装置(1)へ加工液を供給し、使用済みの加工液を再生処理してダイシング装置(1)へ再度供給する。再生処理された加工液を貯留する供給タンク(15)と、再生処理された加工液を、再度、ダイシング装置(1)へ供給する供給ポンプ(12)と、加工装置へ加工液を供給する供給経路(11)と、供給経路(11)の中途から供給タンク(15)へ加工液を戻す戻り配管(41)とを備えている。インバータ制御により供給ポンプ(12)の加工液の供給量を変動させることができ、加工液の供給量が所定量より少ない場合、戻り配管(41)を介して供給タンク(15)へ加工液を誘導する。
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