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Machine translation
1. (WO2013053586) ULTRASONIC SENSOR ARRAY
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2013/053586    International Application No.:    PCT/EP2012/068710
Publication Date: 18.04.2013 International Filing Date: 21.09.2012
IPC:
B06B 1/06 (2006.01), G01H 11/06 (2006.01), G01S 7/521 (2006.01)
Applicants: ROBERT BOSCH GMBH [DE/DE]; Postfach 30 02 20 70442 Stuttgart (DE) (For All Designated States Except US).
Bartylla, David [DE/DE]; (DE) (US only)
Inventors: Bartylla, David; (DE)
Common
Representative:
ROBERT BOSCH GMBH; Postfach 30 02 20 70442 Stuttgart (DE)
Priority Data:
102011084537.2 14.10.2011 DE
Title (DE) ULTRASCHALLSENSORARRAY
(EN) ULTRASONIC SENSOR ARRAY
(FR) MATRICE DE CAPTEUR À ULTRASONS
Abstract: front page image
(DE)Die Erfindung bezieht sich auf einen Ultraschallsensor, insbesondere ein Ultraschallsensorfeld (10) mit einer Anzahl von MEMS-Komponenten (14). Diese sind in einzelnen Sensorfeldzellen (12) angeordnet, deren Öffnungen von einer Deckschicht (20) überdeckt sind. Zwischen der Deckschicht (20) und der MEMS-Komponenten (14), die in einer jeweiligen Sensorfeldzelle (12) angeordnet ist, besteht ein Abstand (28). Zwischen der Deckschicht (20) und der MEMS-Komponente (14) in der jeweiligen Sensorfeldzelle (12) ist ein Luftvolumen (24) zur Schallübertragung eingeschlossen.
(EN)The invention relates to an ultrasonic sensor, more particularly an ultrasonic sensor array (10) having a plurality of MEMS components (14). These are arranged in individual sensor array cells (12), the openings of which are covered by a cover layer (20). Occurring between the cover layer (20) and the MEMS components (14), each of which is arranged in its own sensor array cell (12), is a gap. For sound transmission, a volume of air (24) is confined between the cover layer (20) and each MEMS component (14) in its sensor array cell (12).
(FR)L'invention concerne un capteur à ultrasons, en particulier une matrice de capteur à ultrasons (10) comportant un certain nombre de composants MEMS (14). Ceux-ci sont disposés dans les cellules individuelles (12) de la matrice de capteur, dont les ouvertures sont recouvertes par une couche de recouvrement (20). Un espace (28) sépare la couche de recouvrement (20) du composant MEMS (14) placé dans la cellule respective (12) de la matrice de capteur. Un volume d'air (24) assurant la transmission des ultrasons est retenu entre la couche de recouvrement (20) et les composant MEMS (14) dans la cellule respective (12) de la matrice de capteur.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: German (DE)
Filing Language: German (DE)