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1. WO2013051372 - SPECTROSCOPIC SENSOR

Publication Number WO/2013/051372
Publication Date 11.04.2013
International Application No. PCT/JP2012/073080
International Filing Date 10.09.2012
IPC
G01J 3/26 2006.1
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
12Generating the spectrum; Monochromators
26using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filter
G01J 3/36 2006.1
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
28Investigating the spectrum
30Measuring the intensity of spectral lines directly on the spectrum itself
36Investigating two or more bands of a spectrum by separate detectors
CPC
G01J 2003/1234
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
12Generating the spectrum; Monochromators
1226Interference filters
1234Continuously variable IF [CVIF]; Wedge type
G01J 2003/2806
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
28Investigating the spectrum
2803using photoelectric array detector
2806Array and filter array
G01J 3/0229
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
02Details
0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
0229using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
G01J 3/26
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
12Generating the spectrum; Monochromators
26using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
G01J 3/2803
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
28Investigating the spectrum
2803using photoelectric array detector
G01J 3/36
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
28Investigating the spectrum
30Measuring the intensity of spectral lines directly on the spectrum itself
36Investigating two or more bands of a spectrum by separate detectors
Applicants
  • 浜松ホトニクス株式会社 HAMAMATSU PHOTONICS K.K. [JP]/[JP] (AllExceptUS)
  • 柴山 勝己 SHIBAYAMA Katsumi [JP]/[JP] (UsOnly)
  • 笠原 隆 KASAHARA Takashi [JP]/[JP] (UsOnly)
Inventors
  • 柴山 勝己 SHIBAYAMA Katsumi
  • 笠原 隆 KASAHARA Takashi
Agents
  • 長谷川 芳樹 HASEGAWA Yoshiki
Priority Data
2011-22018004.10.2011JP
Publication Language Japanese (ja)
Filing Language Japanese (JA)
Designated States
Title
(EN) SPECTROSCOPIC SENSOR
(FR) CAPTEUR STÉRÉOSCOPIQUE
(JA) 分光センサ
Abstract
(EN) A spectroscopic sensor (1) has a cavity layer (21) and first and second mirror layers (22, 23) facing each other via the cavity layer (21), and comprises: an interference filter section (20) that selectively transmits light within a prescribed wavelength range, according to the incident position; a light transmission substrate (3) arranged on the first mirror layer (22) side and which transmits light incident to the interference filter section (20); and a light detection substrate (4) arranged on the second mirror layer (23) side and which detects light that has passed through the interference filter section (20). The cavity layer (21) has: a filter region (24) interposed between the first and second mirror layers (22, 23); an annular encircling region (25) that encircles the filter region (24) at a prescribed distance from the filter region (24); and an annular connection region (26) that connects a terminal section (24e) on the light detection substrate (4) side of the filter region (24) and a terminal section (25e) on the light detection substrate (4) side of the encircling region (25).
(FR) L'invention concerne un capteur stéréoscopique (1) comprenant une couche de cavité (21) et une première et une seconde couche de miroir (22, 23) se faisant face via la cavité de couche (21), et comprenant : une section de filtre d'interférence (20) qui transmet sélectivement la lumière dans une plage de longueur d'onde donnée en fonction de la position incidente ; un substrat de transmission de lumière (3) disposé sur le côté de la première couche de miroir (22) et transmettant la lumière incidente vers la section de filtre d'interférence (20) ; et un substrat de détection de lumière (4) disposé sur le côté de la seconde couche de miroir (23) et détectant la lumière qui est passée à travers la section de filtre d'interférence (20). La couche de cavité (21) comprend : une région de filtre (24) disposée entre les première et seconde couches de miroir (22, 23) ; une section d'encerclement annulaire (25) qui encercle la région de filtre (24) à une distance donnée de la région de filtre (24) ; et une région de connexion annulaire (26) qui connecte une section terminale (24e) sur le côté du substrat de détection de lumière (4) de la région de filtre (24) et une section terminale (25e) du côté du substrat de détection de lumière (4) de la région d'encerclement (25).
(JA)  分光センサ1は、キャビティ層21並びにキャビティ層21を介して対向する第1及び第2のミラー層22,23を有し、所定の波長範囲の光を入射位置に応じて選択的に透過させる干渉フィルタ部20と、第1のミラー層22側に配置され、干渉フィルタ部20に入射する光を透過させる光透過基板3と、第2のミラー層23側に配置され、干渉フィルタ部20を透過した光を検出する光検出基板4と、を備える。キャビティ層21は、第1及び第2のミラー層22,23によって挟まれたフィルタ領域24と、フィルタ領域24から所定の距離をとってフィルタ領域24を包囲する環状の包囲領域25と、フィルタ領域24の光検出基板4側の端部24eと包囲領域25の光検出基板4側の端部25eとを接続する環状の接続領域26と、を有する。
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