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1. (WO2013049274) LARGE -AREA SPUTTERING TARGETS
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2013/049274    International Application No.:    PCT/US2012/057434
Publication Date: 04.04.2013 International Filing Date: 27.09.2012
IPC:
C23C 14/34 (2006.01), B23K 11/11 (2006.01)
Applicants: H.C. STARCK, INC. [US/US]; 45 Industrial Place Newton, MA 02461 (US)
Inventors: DARY, Francois-Charles; (US).
GAYDOS, Mark; (US).
LOEWENTHAL, William; (US).
MILLER, Steven, Alfred; (US).
ROZAK, Gary; (US).
VOLCHKO, Scott, Jeffrey; (US).
ZIMMERMAN, Stefan; (DE).
STAWOVY, Michael, Thomas; (US)
Agent: CURRIE, Matthew, T.; Bingham McCutchen LLP 2020 K Street, Nw Washington, DC 20006 (US)
Priority Data:
61/648,333 17.05.2012 US
61/540,644 29.09.2011 US
Title (EN) LARGE -AREA SPUTTERING TARGETS
(FR) CIBLES DE PULVÉRISATION À GRANDE SURFACE ET PROCÉDÉS DE FABRICATION DE CIBLES DE PULVÉRISATION À GRANDE SURFACE
Abstract: front page image
(EN)In various embodiments, joined sputtering targets are formed at least in part by spray deposition of the sputtering material and/or welding.
(FR)Dans divers modes de réalisation, des cibles de pulvérisation assemblées sont formées au moins en partie par dépôt par pulvérisation de la matière de pulvérisation et/ou soudage.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)