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Machine translation
1. (WO2013047933) MEMS RESONANT ACCELEROMETER
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2013/047933    International Application No.:    PCT/KR2011/007284
Publication Date: 04.04.2013 International Filing Date: 30.09.2011
IPC:
G01P 15/10 (2006.01), G01C 19/56 (2012.01), B81B 3/00 (2006.01)
Applicants: MICROINFINITY, INC. [KR/KR]; 8th Floor, Nano Fab Center 906-10 Iui-dong, Yeongtong-gu Suwon-si Gyeonggi-do 443-270 (KR) (For All Designated States Except US).
JEONG, Hyeong-Gyun [KR/KR]; (KR) (For US Only).
SONG, Jin-Woo [KR/KR]; (KR) (For US Only)
Inventors: JEONG, Hyeong-Gyun; (KR).
SONG, Jin-Woo; (KR)
Agent: KASAN IP & LAW FIRM; 7th Floor, Hanwon Building, 2423 Nambusunhwan-ro, Seocho-gu Seoul 137-070 (KR)
Priority Data:
10-2011-0099723 30.09.2011 KR
Title (EN) MEMS RESONANT ACCELEROMETER
(FR) ACCÉLÉROMÈTRE RÉSONNANT À MEMS
(KO) 초소형 공진형 가속도계
Abstract: front page image
(EN)Provided is a micro electro mechanical system (MEMS) resonant accelerometer. The MEMS resonant accelerometer according to the present invention comprises: a first inertial mass; a second inertial mass which is spaced at a predetermined distance from the first inertial mass on a first shaft; an elastic body which is provided between the first and second inertial masses so as to apply elasticity; and a tuning fork which is connected to the elastic body and measures the change of frequency according to acceleration, wherein the longitudinal direction of the tuning fork is parallel to a second shaft which is perpendicular to the first shaft, the elastic body has an opening portion being in a circular shape with a portion thereof removed, and one end of the tuning fork penetrates the opening portion and is connected to the inside surface of the elastic body.
(FR)La présente invention concerne un accéléromètre résonnant à microsystème électromécanique (MEMS). L'accéléromètre résonnant à MEMS de l'invention comprend : une première masse inertielle; une seconde masse inertielle qui est séparée de la première masse inertielle par une distance prédéterminée sur un premier arbre; un corps élastique se trouvant entre la première et la seconde masse inertielle, servant à appliquer une élasticité; et un diapason qui est fixé au corps élastique et qui mesure le changement de fréquence en fonction de l'accélération. La direction longitudinale du diapason est parallèle à un second arbre qui est perpendiculaire au premier arbre, le corps élastique comporte une partie ouverture de forme circulaire dont une partie est éliminée, et une extrémité du diapason pénètre la partie ouverture et est fixée à la surface interne du corps élastique.
(KO)초소형 공진형 가속도계가 제공된다. 본 발명에 따른 초소형 공진형 가속도계는, 제1 관성질량체; 상기 제1 관성질량체와 제1 축 상에서 소정 간격으로 이격된 제2 관성질량체; 상기 제1 및 제2 관성질량체 사이에 구비되어 탄성력을 부여하는 탄성체; 및 상기 탄성체와 연결되고 가속도에 따른 주파수 변화를 측정하기 위한 튜닝포크를 포함하되, 상기 튜닝포크의 길이방향이 상기 제1 축과 수직한 제2 축과 평행하고, 상기 탄성체는 원형에서 일부가 제거된 개방부를 가지고, 상기 튜닝포크의 일단은 상기 개방부를 관통하여 상기 탄성체의 내측면과 연결된다.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Korean (KO)
Filing Language: Korean (KO)