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1. (WO2013047920) SCANNING ELECTRON MICROSCOPE AND METHOD FOR MEASURING CURRENT OF PRIMARY ELECTRONS, USING SAME
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2013/047920    International Application No.:    PCT/KR2011/007129
Publication Date: 04.04.2013 International Filing Date: 28.09.2011
IPC:
H01J 37/28 (2006.01), H01J 37/244 (2006.01)
Applicants: SNU PRECISION CO., LTD. [KR/KR]; 1629-2, Bongcheon7-dong, Gwanak-gu Seoul 152-818 (KR) (For All Designated States Except US).
KIM, Souk [KR/KR]; (KR) (For US Only).
AHN, Jae Hyung [KR/KR]; (KR) (For US Only).
KANG, Soon Bong [KR/KR]; (KR) (For US Only)
Inventors: KIM, Souk; (KR).
AHN, Jae Hyung; (KR).
KANG, Soon Bong; (KR)
Agent: CHO, YoungHyun; (Daeju Patent & Law Office) 8F, Gyeongmok Bldg., (Secho-dong) 3, Seoun-ro, Seocho-gu Seoul 137-070 (KR)
Priority Data:
10-2011-0097829 27.09.2011 KR
Title (EN) SCANNING ELECTRON MICROSCOPE AND METHOD FOR MEASURING CURRENT OF PRIMARY ELECTRONS, USING SAME
(FR) MICROSCOPE ÉLECTRONIQUE À BALAYAGE ET PROCÉDÉ DE MESURE D'UN COURANT D'ÉLECTRONS PRIMAIRES L'UTILISANT
(KO) 주사전자현미경 및 이를 이용한 1차전자의 전류량 측정 방법
Abstract: front page image
(EN)The present invention relates to a scanning electron microscope and to a method for using the scanning electron microscope to measure the current of primary and secondary electrons. The scanning electron microscope is characterised by comprising: a lens tube, having an accommodating space formed therein; a source, which is furnished inside the lens tube, facing a specimen on the outside of the lens tube, and which generates electrically charged primary electrons; a filter, which is furnished below the source inside the lens tube, and which alters the movement path of the primary electrons and secondary electrons, emitted after the primary electrons have collided with the specimen; a first detector, which is furnished inside the lens tube between the filter and the specimen, and which detects the current of the primary electrons, having an altered movement path due to an electromagnetic field generated by the filter; a second detector, which is furnished inside the lens tube between the source and the filter, and which detects the secondary electrons, having an altered movement path due to the filter; and a filter control unit which controls the filter so as to selectively alter the movement paths of the primary electrons and the secondary electrons. Thus, provided are a scanning electron microscope which ensures efficient detection operation and has a reduced overall device size, and a method for using the scanning electron microscope to measure the current of primary electrons.
(FR)La présente invention concerne un microscope électronique à balayage et un procédé permettant d'utiliser le microscope électronique à balayage pour mesurer le courant d'électrons primaires et secondaires. Le microscope électronique à balayage est caractérisé en ce qu'il comprend : un tube à lentilles dans lequel est formé un espace d'accueil ; une source qui est disposée à l'intérieur du tube à lentilles, face à un échantillon à l'extérieur dudit tube, et qui génère des électrons primaires chargés électriquement ; un filtre qui est disposé en dessous de la source à l'intérieur dudit tube et qui modifie le trajet de déplacement des électrons primaires et des électrons secondaires, émis après l'impact des électrons primaires avec l'échantillon ; un premier détecteur qui est disposé à l'intérieur dudit tube entre le filtre et l'échantillon et qui détecte le courant des électrons primaires, présentant un trajet de déplacement modifié en raison d'un champ électromagnétique généré par le filtre ; un second détecteur qui est disposé à l'intérieur dudit tube entre la source et le filtre et qui détecte les électrons secondaires, présentant un trajet de déplacement modifié dû au filtre ; et une unité de commande de filtre qui commande le filtre de façon à modifier sélectivement les trajets de déplacement des électrons primaires et secondaires. Ainsi, l'invention concerne un microscope électronique à balayage qui assure une détection efficace et possède une taille globale réduite, et un procédé permettant d'utiliser le microscope électronique à balayage pour mesurer le courant d'électrons primaires.
(KO)본 발명은 주사전자현미경 및 이를 이용한 1차전자 및 2차전자의 전류량 측정 방법관한 것으로서, 주사전자현미경에 있어서, 내부에 수용공간이 형성된 경통;과, 상기 경통 내부에 설치되며 상기 경통 외부의 시편을 향하여 하전된 1차전자를 발생시키는 소스;와, 상기 경통 내부에서 상기 소스의 하부에 설치되며, 상기 1차전자 및 상기 1차전자가 상기 시편에 충돌한 후 방출되는 2차전자의 이동 경로를 바꾸는 필터;와, 상기 필터와 상기 시편 사이의 상기 경통 내부에 설치되고, 상기 필터에서 발생되는 전자기장에 의하여 이동 경로가 변경된 상기 1차전자에 의한 전류량을 검출하는 제1검출기;와, 상기 소스와 상기 필터 사이의 상기 경통 내부에 설치되고, 상기 필터에 의하여 이동 경로가 변경된 상기 2차전자를 검출하는 제2검출기;와, 상기 1차전자 및 상기 2차전자의 이동 경로를 선택적으로 변경하도록 상기 필터를 제어하는 필터제어부;를 포함하는 것을 특징으로 한다. 이에 의하여 검사 작업의 효율성이 확보되며, 장치가 전체 크기가 소형화된 주사전자현미경 및 이를 이용한 1차전자의 전류량 측정 방법이 제공된다.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Korean (KO)
Filing Language: Korean (KO)