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1. (WO2013047195) MOLD BLANK, MASTER MOLD, COPY MOLD, AND METHOD FOR MANUFACTURING MOLD BLANK
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2013/047195    International Application No.:    PCT/JP2012/073259
Publication Date: 04.04.2013 International Filing Date: 12.09.2012
IPC:
H01L 21/027 (2006.01), B29C 33/38 (2006.01), B29C 59/02 (2006.01), B81C 99/00 (2010.01), G03F 1/50 (2012.01), G11B 5/84 (2006.01)
Applicants: HOYA CORPORATION [JP/JP]; 7-5, Nakaochiai 2-chome, Shinjuku-ku, Tokyo 1618525 (JP) (For All Designated States Except US).
TANIGUCHI Kazutake [JP/JP]; (JP) (For US Only).
KISHIMOTO Shuji [JP/JP]; (JP) (For US Only).
SATO Takashi [JP/JP]; (JP) (For US Only)
Inventors: TANIGUCHI Kazutake; (JP).
KISHIMOTO Shuji; (JP).
SATO Takashi; (JP)
Agent: ANIYA Setuo; 21 TOWA BLDG. 3F, 6-1, Iidabashi 4-chome, Chiyoda-ku, Tokyo 1020072 (JP)
Priority Data:
2011-217672 30.09.2011 JP
Title (EN) MOLD BLANK, MASTER MOLD, COPY MOLD, AND METHOD FOR MANUFACTURING MOLD BLANK
(FR) EBAUCHE DE MOULE, MOULE MAÎTRE, MOULE DE COPIE ET PROCÉDÉ DE FABRICATION D'ÉBAUCHE DE MOULE
(JA) モールドブランク、マスターモールド、コピーモールドおよびモールドブランクの製造方法
Abstract: front page image
(EN)In a mold blank provided with a hard mask layer, the hard mask layer has a composition that includes chromium, nitrogen, and oxygen, and also has a content changing structure in which the nitrogen content changes continuously or stepwise in the direction of layer thickness and the oxygen content changes continuously or stepwise in substantially the opposite orientation of the nitrogen in the direction of that layer thickness.
(FR)Selon l'invention, dans une ébauche de moule pourvue d'une couche de masque dur, la couche de masque dur a une composition qui comprend du chrome, de l'azote et de l'oxygène, et comprend également une structure à variation de teneur dans laquelle la teneur en azote varie d'une manière continue ou par échelons dans la direction d'épaisseur de couche et la teneur en oxygène varie d'une manière continue ou par échelons dans l'orientation sensiblement opposée à l'azote dans la direction de l'épaisseur de cette couche.
(JA) ハードマスク層を備えるモールドブランクにおいて、前記ハードマスク層は、クロム、窒素および酸素を含む組成を有するとともに、前記窒素の含有率が層厚方向で連続的または段階的に変化し、かつ、前記酸素の含有率が前記層厚方向で前記窒素とは実質的に逆向きへ連続的または段階的に変化する含有率変化構造を有する。
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)