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1. (WO2013045643) PLASMA GENERATOR
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2013/045643    International Application No.:    PCT/EP2012/069234
Publication Date: 04.04.2013 International Filing Date: 28.09.2012
IPC:
H05H 1/30 (2006.01), H05H 1/46 (2006.01)
Applicants: MAPPER LITHOGRAPHY IP B.V. [NL/NL]; Computerlaan 15 NL-2628 XK Delft (NL)
Inventors: SMITS, Marc; (NL).
LODEWIJK, Chris, Franciscus, Jessica; (NL)
Agent: MOOIJ, Maarten; Hoyng Monegier LLP Rembrandt Tower 31st Floor Amstelplein 1 NL-1096 HA Amsterdam (NL)
Priority Data:
61/540,396 28.09.2011 US
61/637,651 24.04.2012 US
61/648,123 17.05.2012 US
Title (EN) PLASMA GENERATOR
(FR) GÉNÉRATEUR DE PLASMA
Abstract: front page image
(EN)An arrangement for generating plasma, the arrangement comprising a primary plasma source (1) arranged for generating plasma, a hollow guiding body (11) arranged for guiding at least a portion of the plasma generated by the primary plasma source to a secondary plasma source (25), and an outlet (14) for emitting at least a portion of the atomic radicals produced by the plasma from the arrangement.
(FR)Système pour générer un plasma, ce système comprenant une source de plasma primaire (1) destinée à générer un plasma, un corps de guidage creux (11) destiné à guider au moins une portion du plasma généré par la source de plasma primaire vers une source de plasma secondaire (25), et une sortie (14) pour émettre au moins une portion des radicaux atomiques produit par le plasma à partir du système.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)