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1. WO2013011172 - THREE-DIMENSIONAL PROFILOMETER BASED ON OPTICAL ABSORPTION IN FLUIDS

Publication Number WO/2013/011172
Publication Date 24.01.2013
International Application No. PCT/ES2012/000207
International Filing Date 20.07.2012
IPC
G01B 11/30 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
30for measuring roughness or irregularity of surfaces
G01B 11/24 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
CPC
G01B 11/24
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
G01B 11/303
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
30for measuring roughness or irregularity of surfaces
303using photoelectric detection means
Applicants
  • UNIVERSIDAD COMPLUTENSE DE MADRID [ES]/[ES] (AllExceptUS)
  • MARTÍNEZ ANTÓN, Juan Carlos [ES]/[ES] (UsOnly)
Inventors
  • MARTÍNEZ ANTÓN, Juan Carlos
Agents
  • PLUMET ORTEGA, Joaquín [ES]/[ES]
Priority Data
P20110083021.07.2011ES
Publication Language Spanish (ES)
Filing Language Spanish (ES)
Designated States
Title
(EN) THREE-DIMENSIONAL PROFILOMETER BASED ON OPTICAL ABSORPTION IN FLUIDS
(ES) PERFILÓMETRO TRIDIMENSIONAL POR ABSORCIÓN ÓPTICA EN FLUIDOS
(FR) PROFILOMETRE TRIDIMENSIONNEL PAR ABSOPRTION OPTIQUE DANS DES FLUIDES
Abstract
(EN)
The invention can be used to measure the topography of surfaces of a transparent or translucent substrate (22) through which light can pass. According to the invention, a reference surface (241) having a known topography is moved closer to the surface (221) being studied. The intermediate space is filled with optically absorbent fluid (23) and the assembly is illuminated with a wide source (15) in which it is possible to differentiate at least two spectral bands with different absorption in the fluid (23). The quotient of integrated radiances in these spectral bands is not dependent on the point of the source or on the direction of observation. The recording of images (32) of the light transmitted in said spectral bands and the subsequent analysis thereof can be used to obtain the full profile of the surface (221) being studied.
(ES)
El invento permite medir la topografía de superficies pertenecientes a un substrato (22) transparente o traslúcido que deja pasar luz a su través. Frente a la superficie de estudio (221) se acerca otra de referencia (241) de la que se conoce su topografía. El espacio intermedio se rellena con fluido ópticamente absorbente (23) y se ilumina el conjunto con una fuente extensa (15) de la que se pueden diferenciar al menos dos bandas espectrales con absorción diferente en el fluido (23). El cociente de radiancias integradas en esas bandas espectrales no depende del punto de la fuente ni de la dirección de observación. El registro de imágenes (32) de la luz transmitida en esas bandas espectrales y su análisis posterior permite obtener el perfil completo de la superficie de estudio (221).
(FR)
L'invention permet de mesurer la topographie de surfaces appartenant à un substrat (22) transparent ou translucide perméable à la lumière. On approche en face de la surface à étudier (221) une surface de référence (241) dont la topographie est connue. L'espace intermédiaire est rempli de fluide optiquement absorbant (23) et on éclaire l'ensemble avec une source étendue (15) dans laquelle on peut différencier au moins deux bandes spectrales présentant une absorption différente dans le fluide (23). Le rapport d'intensités lumineuses intégrées dans ces bandes spectrales ne dépend pas de l'endroit de la source, ni de la direction d'observation. L'enregistrement d'images (32) de la lumière transmise dans ces bandes spectrales et leur analyse ultérieure permettent d'obtenir le profil complet de la surface à étudier (221).
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