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1. WO2013010857 - APPARATUS FOR TACTILE FORM DETERMINATION

Publication Number WO/2013/010857
Publication Date 24.01.2013
International Application No. PCT/EP2012/063503
International Filing Date 10.07.2012
IPC
G01B 11/00 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
G01B 11/30 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
30for measuring roughness or irregularity of surfaces
G01Q 60/04 2010.01
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY
60Particular types of SPM or apparatus therefor; Essential components thereof
02Multiple-type SPM, i.e. involving two or more SPM techniques
04STM combined with AFM
CPC
G01B 11/007
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
002for measuring two or more coordinates
005coordinate measuring machines
007feeler heads therefor
G01B 11/026
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
02for measuring length, width or thickness
026by measuring distance between sensor and object
G01B 11/2441
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
2441using interferometry
G01B 11/30
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
30for measuring roughness or irregularity of surfaces
G01B 5/20
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
5Measuring arrangements characterised by the use of mechanical means
20for measuring contours or curvatures
G01B 5/28
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
5Measuring arrangements characterised by the use of mechanical means
28for measuring roughness or irregularity of surfaces
Applicants
  • ROBERT BOSCH GMBH [DE]/[DE] (AllExceptUS)
  • ORTNER, Gerhard [DE]/[DE] (UsOnly)
  • LESSING, Ulrich [DE]/[DE] (UsOnly)
  • DRABAREK, Pawel [DE]/[DE] (UsOnly)
Inventors
  • ORTNER, Gerhard
  • LESSING, Ulrich
  • DRABAREK, Pawel
Common Representative
  • ROBERT BOSCH GMBH
Priority Data
102011079447.620.07.2011DE
Publication Language German (DE)
Filing Language German (DE)
Designated States
Title
(DE) VORRICHTUNG ZUR TAKTILEN FORMBESTIMMUNG
(EN) APPARATUS FOR TACTILE FORM DETERMINATION
(FR) DISPOSITIF DESTINÉ À DÉTERMINER UNE FORME DE MANIÈRE TACTILE
Abstract
(DE)
Die Erfindung betrifft eine Vorrichtung zur taktilen Bestimmung einer Oberflächenform eines Messobjekts mit einem Mikrotastarm mit einer Tastspitze. Erfindungsgemäß ist der Mikrotastarm an einer Lichtleitfaser mit einem Faser-Ende befestigt, die in einem Tastergehäuse gehaltert ist, ist in dem Tastergehäuse ein Referenzspiegel vorgesehen, und ist zur Bestimmung der Position des Faser-Endes gegenüber dem Referenzspiegel eine optische, insbesondere interferometrische Messeinrichtung vorgesehen. Die erfindungsgemäße Vorrichtung ermöglicht eine kostengünstige taktile Bestimmung der Form eines Meßobjekts wie dessen Rauhigkeit. Durch die Halterung des Mikrotastarms an der Lichtleitfaser wird kein mechanisches Gelenk für den Mikrotastarm benötigt. Die berührungslose interferometrische Bestimmung des Abstandes zwischen dem Faser-Ende der Lichtleitfaser und dem in dem Tastergehäuse angebrachten Referenzspiegel ermöglicht eine besonders präzise Bestimmung der Oberflächenform des Messobjekts.
(EN)
The invention relates to an apparatus for determining in a tactile manner a surface form of a measurement object with a microsensing arm having a sensing tip. According to the invention, the microsensing arm is secured to an optical fibre with a fibre end, which optical fibre is held in a sensor housing, a reference mirror is provided in the sensor housing, and an optical, in particular interferometric measuring device is provided for determining the position of the fibre end relative to the reference mirror. The apparatus according to the invention permits a cost-effective tactile determination of the form of a measurement object, such as the roughness thereof. On account of the microsensing arm being held at the optical fibre, no mechanical articulation for the microsensing arm is necessary. The contactless interferometric determination of the distance between the fibre end of the optical fibre and the reference mirror, which is mounted in the sensor housing, permits a particularly precise determination of the surface form of the measurement object.
(FR)
L'invention concerne un dispositif destiné à déterminer de manière tactile une forme superficielle d'un objet à mesurer, au moyen d'un microbras palpeur pourvu d'une pointe de palpation. Selon l'invention, le microbras palpeur est fixé sur une fibre optique qui est pourvue d'une extrémité de fibre et qui est supportée par un boîtier de palpeur, un miroir de référence est disposé dans ledit boîtier de palpeur, et un dispositif de mesure optique, notamment interférométrique, est disposé à l'opposé du miroir de référence pour déterminer la position de ladite extrémité de fibre. Le dispositif selon l'invention permet de déterminer de façon tactile et économique la forme d'un objet à mesure ainsi que de sa rugosité. Le microbras palpeur étant maintenu sur la fibre optique, le microbras de palpage ne nécessite aucune articulation mécanique. La distance entre l'extrémité de fibre de la fibre optique et le miroir de référence disposé dans le boîtier de palpeur étant déterminée sans contact de manière interférométrique, la forme superficielle de l'objet à mesurer peut être déterminée avec une précision particulièrement élevée.
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