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1. WO2013006477 - UNIFORM FLUID MANIFOLD FOR ACOUSTIC TRANSDUCER

Publication Number WO/2013/006477
Publication Date 10.01.2013
International Application No. PCT/US2012/045059
International Filing Date 29.06.2012
IPC
B08B 3/12 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
08CLEANING
BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
3Cleaning by methods involving the use or presence of liquid or steam
04Cleaning involving contact with liquid
10with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity, by vibration
12by sonic or ultrasonic vibrations
CPC
B08B 3/12
BPERFORMING OPERATIONS; TRANSPORTING
08CLEANING
BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
3Cleaning by methods involving the use or presence of liquid or steam
04Cleaning involving contact with liquid
10with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity, by vibration
12by sonic or ultrasonic vibrations
H01L 21/67051
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
67005Apparatus not specifically provided for elsewhere
67011Apparatus for manufacture or treatment
67017Apparatus for fluid treatment
67028for cleaning followed by drying, rinsing, stripping, blasting or the like
6704for wet cleaning or washing
67051using mainly spraying means, e.g. nozzles
Applicants
  • PRODUCT SYSTEMS INCORPORATED [US]/[US] (AllExceptUS)
  • BECK, Mark, J. [US]/[US] (UsOnly)
  • LIEBSCHER, Eric, G. [US]/[US] (UsOnly)
Inventors
  • BECK, Mark, J.
  • LIEBSCHER, Eric, G.
Agents
  • PAGEL, Donald, J.
Priority Data
61/504,30004.07.2011US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) UNIFORM FLUID MANIFOLD FOR ACOUSTIC TRANSDUCER
(FR) COLLECTEUR DE FLUIDE UNIFORME POUR TRANSDUCTEUR ACOUSTIQUE
Abstract
(EN)
A fluid manifold (48) comprised of a manifold adapted to deliver fluid (56) directly into a gap (68) formed between a surface of a substrate (76) and an acoustic transducer (44). The fluid is delivered into the gap at a variable rate along a length of the 5 manifold. Preferably, the manifold includes a plurality of apertures (52) positioned along the length of the manifold for dispensing the fluid into the gap at the variable rate.
(FR)
L'invention concerne un collecteur de fluide (48) comprenant un collecteur conçu pour distribuer un fluide (56) directement dans un espace (68) formé entre une surface de substrat (76) et un transducteur acoustique (44). Le fluide est distribué dans l'espace à un débit variable sur une longueur du collecteur. Le collecteur comprend, de préférence, une pluralité d'ouvertures (52) positionnées sur la longueur du collecteur pour distribuer le fluide dans l'espace à un débit variable.
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