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1. (WO2012172722) SUBSTRATE CONVEYANCE ROLLER, THIN FILM MANUFACTURING DEVICE AND THIN FILM MANUFACTURING METHOD
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2012/172722 International Application No.: PCT/JP2012/002847
Publication Date: 20.12.2012 International Filing Date: 25.04.2012
Chapter 2 Demand Filed: 12.11.2012
IPC:
C23C 14/56 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
56
Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
Applicants:
パナソニック株式会社 PANASONIC CORPORATION [JP/JP]; 大阪府門真市大字門真1006番地 1006, Oaza Kadoma, Kadoma-shi, Osaka 5718501, JP (AllExceptUS)
本田 和義 HONDA, Kazuyoshi; null (UsOnly)
岡崎 禎之 OKAZAKI, Sadayuki; null (UsOnly)
天羽 則晶 AMO, Noriaki; null (UsOnly)
内田 紀幸 UCHIDA, Noriyuki; null (UsOnly)
末次 大輔 SUETSUGU, Daisuke; null (UsOnly)
Inventors:
本田 和義 HONDA, Kazuyoshi; null
岡崎 禎之 OKAZAKI, Sadayuki; null
天羽 則晶 AMO, Noriaki; null
内田 紀幸 UCHIDA, Noriyuki; null
末次 大輔 SUETSUGU, Daisuke; null
Agent:
鎌田 耕一 KAMADA, Koichi; 大阪府大阪市北区西天満4丁目3番25号梅田プラザビル別館8階 8th Fl., UMEDA PLAZA BLDG. ANNEX, 4-3-25, Nishitenma, Kita-ku, Osaka-shi, Osaka 5300047, JP
Priority Data:
2011-13296415.06.2011JP
Title (EN) SUBSTRATE CONVEYANCE ROLLER, THIN FILM MANUFACTURING DEVICE AND THIN FILM MANUFACTURING METHOD
(FR) ROULEAU DE TRANSPORT DE SUBSTRAT, DISPOSITIF DE FABRICATION DE FILM MINCE ET PROCÉDÉ DE FABRICATION DE FILM MINCE
(JA) 基板搬送ローラ、薄膜製造装置及び薄膜製造方法
Abstract:
(EN) This roller (6A) is configured so as to convey a substrate in a vacuum. The roller has a first shell (11), an inner block (12), and a shaft (10). The first shell (11) has a cylindrical circumferential surface for supporting the substrate, and can be rotated in synchronism with the substrate. The inner block (12) is provided inside the first shell (11) and is prohibited from rotating in synchronism with the substrate. The shaft (10) penetrates the inner block (12) and supports the inner block. A gap section (15) is formed between the inner circumferential surface of the first shell (11) and the inner block (12). A gas is introduced into the gap section (15) from the inner block (12) toward the inner circumferential surface of the first shell (11).
(FR) La présente invention se rapporte à un rouleau (6A) qui est configuré pour transporter un substrat dans le vide. Le rouleau présente une première coque (11), un bloc interne (12) et un arbre (10). La première coque (11) présente une surface circonférentielle cylindrique destinée à supporter le substrat, et peut être tournée de manière synchronisée avec le substrat. Le bloc interne (12) est agencé à l'intérieur de la première coque (11) et ne peut pas tourner de manière synchronisée avec le substrat. L'arbre (10) pénètre dans le bloc interne (12) et supporte le bloc interne. Une section d'espace (15) est formée entre la surface circonférentielle interne de la première coque (11) et le bloc interne (12). Un gaz est introduit dans la section d'espace (15) depuis le bloc interne (12) vers la surface circonférentielle interne de la première coque (11).
(JA)  基板搬送ローラ6Aは、真空中で基板を搬送するように構成され、第1シェル11、内ブロック12及びシャフト10を備えている。第1シェル11は、基板を支持するための円筒形の外周面を有し、基板と同期して回転できる。内ブロック12は、第1シェル11の内部に配置され、基板と同期して回転することが禁止されている。シャフト10は、内ブロック12を貫通し、かつ支持している。第1シェル11の内周面と内ブロック12との間に隙間部15が形成されている。隙間部15には、内ブロック12から第1シェル11の前記内周面に向かってガスが導入される。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)
Also published as:
US20130330472JPWO2012172722